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Toshiro YAMAMOTO
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Kanagawa, JP
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last 30 patents
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Patent Grant
Charged particle beam lithography apparatus and charged particle be...
Patent number
7,750,324
Issue date
Jul 6, 2010
Nuflare Technology, Inc.
Susumu Oogi
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND CHARGED PARTICLE BE...
Publication number
20090057575
Publication date
Mar 5, 2009
NuFlare Technology, Inc.
Susumu OOGI
B82 - NANO-TECHNOLOGY