Toshitaka Oono

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Tokyo, JP

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Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE STORAGE FACILITY
- Publication number 20100316467
- Publication date Dec 16, 2010
- Mareto Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER STORING CABINET AND STORAGE CONTROL METHOD THEREOF
- Publication number 20100241271
- Publication date Sep 23, 2010
- IHI Corporation
- Takao Shimizu
- H01 - BASIC ELECTRIC ELEMENTS