Toshitake Tsuda

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Sagamihara, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of heat treatment
- Patent number 6,635,310
- Issue date Oct 21, 2003
- Tokyo Electron Limited
- Hitoshi Kato
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240222157
- Publication date Jul 4, 2024
- TOKYO ELECTRON LIMITED
- Song yun Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20220013404
- Publication date Jan 13, 2022
- TOKYO ELECTRON LIMITED
- Kazuo KIBI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210305066
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Song yun Kang
- H01 - BASIC ELECTRIC ELEMENTS