Toshiya Asano

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Linear motor, moving stage system, exposure apparatus, and device m...
- Patent number 7,348,695
- Issue date Mar 25, 2008
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Alignment apparatus, exposure apparatus, and device manufacturing m...
- Patent number 7,330,093
- Issue date Feb 12, 2008
- Canon Kabushiki Kaisha
- Toshiya Asano
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Alignment apparatus, exposure apparatus, and device manufacturing m...
- Patent number 7,193,493
- Issue date Mar 20, 2007
- Canon Kabushiki Kaisha
- Toshiya Asano
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Linear motor, moving stage system, exposure apparatus, and device m...
- Patent number 7,067,942
- Issue date Jun 27, 2006
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
STAGE APPARATUS WHICH SUPPORTS INTERFEROMETER, STAGE POSITION MEASU...
- Patent number 6,867,849
- Issue date Mar 15, 2005
- Canon Kabushiki Kaisha
- Kazunori Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus, exposure apparatus, and device production method
- Patent number 6,654,098
- Issue date Nov 25, 2003
- Canon Kabushiki Kaisha
- Toshiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage control apparatus and exposure apparatus
- Patent number 6,495,847
- Issue date Dec 17, 2002
- Canon Kabushiki Kaisha
- Toshiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage device and pattern transfer system using the same
- Patent number 5,684,856
- Issue date Nov 4, 1997
- Canon Kabushiki Kaisha
- Hirohito Itoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Linear motor, moving stage system, exposure apparatus, and device m...
- Publication number 20060082225
- Publication date Apr 20, 2006
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment apparatus, exposure apparatus, and device manufacturing m...
- Publication number 20060028310
- Publication date Feb 9, 2006
- Canon Kabushiki Kaisha
- Toshiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Linear motor, moving stage system, exposure apparatus, and device m...
- Publication number 20040207271
- Publication date Oct 21, 2004
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment apparatus, exposure apparatus, and device manufacturing m...
- Publication number 20040112164
- Publication date Jun 17, 2004
- Canon Kabushiki Kaisha
- Toshiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus which supports interferometer, stage position measu...
- Publication number 20020008877
- Publication date Jan 24, 2002
- Kazunori Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus, exposure apparatus, and device production method
- Publication number 20010015799
- Publication date Aug 23, 2001
- Toshiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Toshiya Asano

Person

Patents Grantslast 30 patents

Linear motor, moving stage system, exposure apparatus, and device m...

Alignment apparatus, exposure apparatus, and device manufacturing m...

Alignment apparatus, exposure apparatus, and device manufacturing m...

Linear motor, moving stage system, exposure apparatus, and device m...

STAGE APPARATUS WHICH SUPPORTS INTERFEROMETER, STAGE POSITION MEASU...

Stage apparatus, exposure apparatus, and device production method

Stage control apparatus and exposure apparatus

Stage device and pattern transfer system using the same

Patents Applicationslast 30 patents

Linear motor, moving stage system, exposure apparatus, and device m...

Alignment apparatus, exposure apparatus, and device manufacturing m...

Linear motor, moving stage system, exposure apparatus, and device m...

Alignment apparatus, exposure apparatus, and device manufacturing m...

Stage apparatus which supports interferometer, stage position measu...

Stage apparatus, exposure apparatus, and device production method