Toshiya CHIBA

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Patents Grantslast 30 patents

Information Patent Grant
Substrate warpage detection device, substrate warpage detection met...
- Patent number 10,763,147
- Issue date Sep 1, 2020
- Tokyo Electron Limited
- Junnosuke Taguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate warping monitoring device and substrate processing appara...
- Patent number 10,615,066
- Issue date Apr 7, 2020
- Tokyo Electron Limited
- Toshiya Chiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Substrate Warpage Detection Device, Substrate Warpage Detection Met...
- Publication number 20190013225
- Publication date Jan 10, 2019
- TOKYO ELECTRON LIMITED
- Junnosuke TAGUCHI
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE WARPING MONITORING DEVICE AND SUBSTRATE PROCESSING APPARA...
- Publication number 20190013224
- Publication date Jan 10, 2019
- TOKYO ELECTRON LIMITED
- Toshiya CHIBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...