Toshiya Miyazaki

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Osaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for detecting etching endpoint, and etching apparatus and et...
- Patent number 6,669,810
- Issue date Dec 30, 2003
- Sumitomo Metal Industries, Ltd.
- Toshiya Miyazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Etching apparatus and etching system using the method thereof
- Patent number 6,149,761
- Issue date Nov 21, 2000
- Sumitomo Metal Industries Limited
- Toshiya Miyazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Method for detecting etching endpoint, and etching apparatus and et...
- Patent number 5,885,472
- Issue date Mar 23, 1999
- Sumitomo Metal Industries Limited
- Toshiya Miyazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Method for detecting etching endpoint and etching apparatus and etc...
- Patent number 5,626,714
- Issue date May 6, 1997
- Sumitomo Metal Industries Limited
- Toshiya Miyazaki
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Plasma Processing Apparatus and Coil Used Therein
- Publication number 20160358748
- Publication date Dec 8, 2016
- SPP TECHNOLOGIES CO., LTD.
- Toshihiro Hayami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20100213170
- Publication date Aug 26, 2010
- ULVAC, Inc.
- Yutaka Kokaze
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND MANUFACTURING METHOD OF DEPOSITION-...
- Publication number 20100151150
- Publication date Jun 17, 2010
- ULVAC, Inc.
- Yutaka Kokaze
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR MANUFACTURING DEVICE
- Publication number 20090275146
- Publication date Nov 5, 2009
- ULVAC, Inc.
- Katsuo TAKANO
- H01 - BASIC ELECTRIC ELEMENTS