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Toshiyuki FUKUMOTO
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Yamanashi, JP
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Patents Grants
last 30 patents
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Patent Grant
Deposition-condition output device, method for outputting depositio...
Patent number
12,148,600
Issue date
Nov 19, 2024
Tokyo Electron Limited
Toshiyuki Fukumoto
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
INFORMATION PROCESSING APPARATUS, STORAGE MEDIUM, AND ANALYSIS METHOD
Publication number
20230418268
Publication date
Dec 28, 2023
TOKYO ELECTRON LIMITED
Toshiyuki FUKUMOTO
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
Publication number
20230085325
Publication date
Mar 16, 2023
TOKYO ELECTRON LIMITED
Hirokazu KYOKANE
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
INFORMATION PROCESSING DEVICE, RECORDING MEDIUM, AND PROCESS CONDIT...
Publication number
20220244685
Publication date
Aug 4, 2022
TOKYO ELECTRON LIMITED
Yuto NODA
G05 - CONTROLLING REGULATING
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Patent Application
DEPOSITION-CONDITION OUTPUT DEVICE, METHOD FOR OUTPUTTING DEPOSITIO...
Publication number
20220037134
Publication date
Feb 3, 2022
TOKYO ELECTRON LIMITED
Toshiyuki FUKUMOTO
G06 - COMPUTING CALCULATING COUNTING