Toshiyuki Kobayashi

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 9,824,861
- Issue date Nov 21, 2017
- Tokyo Electron Limited
- Masahiro Numakura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, control method adopted in substrate...
- Patent number 8,859,046
- Issue date Oct 14, 2014
- Tokyo Electron Limited
- Hiroshi Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitive coupling plasma processing apparatus and method
- Patent number 7,692,916
- Issue date Apr 6, 2010
- Tokyo Electron Limited
- Naoki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20160190024
- Publication date Jun 30, 2016
- TOKYO ELECTRON LIMITED
- Masahiro NUMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD ADOPTED IN SUBSTRATE...
- Publication number 20120046774
- Publication date Feb 23, 2012
- TOKYO ELECTRON LIMITED
- Hiroshi Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Capacitive coupling plasma processing apparatus and method
- Publication number 20070029194
- Publication date Feb 8, 2007
- Naoki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus, control method adopted in substrate...
- Publication number 20060176928
- Publication date Aug 10, 2006
- TOKYO ELECTRON LIMITED
- Hiroshi Nakamura
- H01 - BASIC ELECTRIC ELEMENTS