Toshiyuki Makabe

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system and transfer method
- Patent number 12,165,893
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mounting table and plasma processing apparatus
- Patent number 10,714,370
- Issue date Jul 14, 2020
- Tokyo Electron Limited
- Taketoshi Tomioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck apparatus
- Patent number 9,721,822
- Issue date Aug 1, 2017
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate temperature adjusting method and a method of changing the...
- Patent number 9,410,753
- Issue date Aug 9, 2016
- Tokyo Electron Limited
- Toshiyuki Makabe
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Electrostatic chuck apparatus
- Patent number 8,981,263
- Issue date Mar 17, 2015
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD
- Publication number 20230215753
- Publication date Jul 6, 2023
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STORAGE CONTAINER AND PROCESSING SYSTEM
- Publication number 20220243336
- Publication date Aug 4, 2022
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK APPARATUS
- Publication number 20150179492
- Publication date Jun 25, 2015
- TOKYO ELECTRON LIMITED
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOUNTING TABLE AND PLASMA PROCESSING APPARATUS
- Publication number 20140238609
- Publication date Aug 28, 2014
- TOKYO ELECTRON LIMITED
- Taketoshi TOMIOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND MET...
- Publication number 20130228323
- Publication date Sep 5, 2013
- TOKYO ELECTRON LIMITED
- Toshiyuki MAKABE
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
ELECTROSTATIC CHUCK APPARATUS
- Publication number 20120281334
- Publication date Nov 8, 2012
- SUMITOMO OSAKA CEMENT CO., LTD.
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE MOUNTING TABLE AND SUBSTRATE PROCESSING APPARATUS HAVING...
- Publication number 20100122774
- Publication date May 20, 2010
- TOKYO ELECTRON LIMITED
- Toshiyuki MAKABE
- H01 - BASIC ELECTRIC ELEMENTS

Toshiyuki Makabe

Person

Patents Grantslast 30 patents

Substrate processing system and transfer method

Mounting table and plasma processing apparatus

Electrostatic chuck apparatus

Substrate temperature adjusting method and a method of changing the...

Electrostatic chuck apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD

STORAGE CONTAINER AND PROCESSING SYSTEM

ELECTROSTATIC CHUCK APPARATUS

MOUNTING TABLE AND PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND MET...

ELECTROSTATIC CHUCK APPARATUS

SUBSTRATE MOUNTING TABLE AND SUBSTRATE PROCESSING APPARATUS HAVING...