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Toshiyuki Matsumoto
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Ibaraki, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Electrolytic treatment apparatus and electrolytic treatment method
Patent number
11,427,921
Issue date
Aug 30, 2022
Tokyo Electron Limited
Tomohisa Hoshino
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Substrate processing method and template
Patent number
10,428,438
Issue date
Oct 1, 2019
Tokyo Electron Limited
Haruo Iwatsu
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Method for manufacturing semiconductor device, semiconductor device...
Patent number
9,087,771
Issue date
Jul 21, 2015
Tokyo Electron Limited
Haruo Iwatsu
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Position detecting method for performing position alignment of tran...
Patent number
8,749,257
Issue date
Jun 10, 2014
Tokyo Electron Limited
Toshiyuki Matsumoto
G01 - MEASURING TESTING
Information
Patent Grant
Wafer thermometer, temperature measuring device, heat treatment dev...
Patent number
8,378,269
Issue date
Feb 19, 2013
Tokyo Electron Limited
Toshiyuki Matsumoto
G01 - MEASURING TESTING
Information
Patent Grant
Jig for detecting position
Patent number
8,149,005
Issue date
Apr 3, 2012
Tokyo Electron Limited
Toshiyuki Matsumoto
G01 - MEASURING TESTING
Information
Patent Grant
Method and system for diagnosing abnormal plasma discharge
Patent number
8,082,124
Issue date
Dec 20, 2011
Ritsumeikan University
Takaya Miyano
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Jig for detecting position
Patent number
7,994,793
Issue date
Aug 9, 2011
Tokyo Electron Limited
Toshiyuki Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature measuring device using oscillating frequency signals
Patent number
7,977,609
Issue date
Jul 12, 2011
Tokyo Electron Limited
Nobuyuki Sata
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Temperature measuring device and method for measuring wafer-type th...
Patent number
7,923,665
Issue date
Apr 12, 2011
Tokyo Electron Limited
Toshiyuki Matsumoto
G01 - MEASURING TESTING
Information
Patent Grant
Device, method and program for inspecting microstructure
Patent number
7,726,190
Issue date
Jun 1, 2010
Tokyo Electron Limited
Toshiyuki Matsumoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device for inspecting micro structure, method for inspecting micro...
Patent number
7,383,732
Issue date
Jun 10, 2008
Octec Inc.
Katsuya Okumura
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capacitance measurement method of micro structures of integrated ci...
Patent number
7,176,706
Issue date
Feb 13, 2007
Tokyo Electron Limited
Matsumoto Toshiyuki
G01 - MEASURING TESTING
Information
Patent Grant
Electrostatic capacitance sensor, electrostatic capacitance sensor...
Patent number
7,161,360
Issue date
Jan 9, 2007
Tokyo Electron Ltd.
Yoshihiro Hirota
G01 - MEASURING TESTING
Information
Patent Grant
Impedance measuring circuit and capacitance measuring circuit
Patent number
7,023,223
Issue date
Apr 4, 2006
Tokyo Electron Limited
Masami Yakabe
G01 - MEASURING TESTING
Information
Patent Grant
Capacitance measurement method of micro structures of integrated ci...
Patent number
6,906,548
Issue date
Jun 14, 2005
Tokyo Electron Limited
Matsumoto Toshiyuki
G01 - MEASURING TESTING
Information
Patent Grant
Electrostatic capacitance sensor, electrostatic capacitance sensor...
Patent number
6,828,806
Issue date
Dec 7, 2004
Sumitomo Metal Industries, Ltd.
Yoshihiro Hirota
G01 - MEASURING TESTING
Information
Patent Grant
Impedance detection circuit, impedance detection device, and impeda...
Patent number
6,756,790
Issue date
Jun 29, 2004
Tokyo Electron Limited
Masami Yakabe
G01 - MEASURING TESTING
Information
Patent Grant
Impedance detection apparatus and method of physical variable
Patent number
6,373,264
Issue date
Apr 16, 2002
Sumitomo Metal Industries, Ltd.
Toshiyuki Matsumoto
G01 - MEASURING TESTING
Information
Patent Grant
Microscopic capacitance measurement system and probing system
Patent number
6,348,809
Issue date
Feb 19, 2002
Sumitomo Metal Industries Limited
Yoshihiro Hirota
G01 - MEASURING TESTING
Information
Patent Grant
Impedance-to-voltage converter
Patent number
6,335,642
Issue date
Jan 1, 2002
Sumitomo Metal Industries Limited
Tatsuo Hiroshima
G01 - MEASURING TESTING
Information
Patent Grant
Static capacitance-to-voltage converter and converting method
Patent number
6,331,780
Issue date
Dec 18, 2001
Sumitomo Metal Industries Ltd.
Tatsuo Hiroshima
G01 - MEASURING TESTING
Information
Patent Grant
Capacitance detection system and method
Patent number
6,326,795
Issue date
Dec 4, 2001
Sumitomo Metal Industries, Ltd.
Toshiyuki Matsumoto
G01 - MEASURING TESTING
Information
Patent Grant
Vibration wave detecting method and vibration wave detector
Patent number
6,227,054
Issue date
May 8, 2001
Sumitomo Metal Industries Limited
Shigeru Ando
G01 - MEASURING TESTING
Information
Patent Grant
Impedance-to-voltage converter and converting method
Patent number
6,194,888
Issue date
Feb 27, 2001
Sumitomo Metal Industries Limited
Toshiyuki Matsumoto
G01 - MEASURING TESTING
Information
Patent Grant
Level shift circuit
Patent number
6,034,549
Issue date
Mar 7, 2000
Sumitomo Metal Industries, Ltd.
Toshiyuki Matsumoto
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Vibration wave detecting method and vibration wave detector
Patent number
6,012,334
Issue date
Jan 11, 2000
Sumitomo Metal Industries Limited
Shigeru Ando
G01 - MEASURING TESTING
Information
Patent Grant
Sensor circuit
Patent number
5,973,538
Issue date
Oct 26, 1999
Sumitomo Medal Industries, Ltd.
Guoliang Shou
G01 - MEASURING TESTING
Information
Patent Grant
Layout structure of capacitive element(s) and interconnections in a...
Patent number
5,892,266
Issue date
Apr 6, 1999
Sumitomo Metal Industries, Ltd.
Yoshihiro Hirota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and manufacturing method thereof
Patent number
5,341,324
Issue date
Aug 23, 1994
Sumitomo Metal Industries, Ltd.
Toshiyuki Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ELECTROLYTIC TREATMENT APPARATUS AND ELECTROLYTIC TREATMENT METHOD
Publication number
20210285119
Publication date
Sep 16, 2021
TOKYO ELECTRON LIMITED
Tomohisa Hoshino
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND TEMPLATE
Publication number
20160108538
Publication date
Apr 21, 2016
TOKYO ELECTRON LIMITED
Haruo IWATSU
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20150303105
Publication date
Oct 22, 2015
Tokyo Electron Limited
Haruo IWATSU
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE...
Publication number
20140151901
Publication date
Jun 5, 2014
TOKYO ELECTRON LIMITED
Haruo IWATSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POSITION DETECTING METHOD
Publication number
20120158355
Publication date
Jun 21, 2012
TOKYO ELECTRON LIMITED
Toshiyuki Matsumoto
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR DIAGNOSING ABNORMAL PLASMA DISCHARGE, ABNORMAL PLASMA DI...
Publication number
20100161278
Publication date
Jun 24, 2010
Takaya Miyano
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
WAFER THERMOMETER, TEMPERATURE MEASURING DEVICE, HEAT TREATMENT DEV...
Publication number
20090242545
Publication date
Oct 1, 2009
TOKYO ELECTRON LIMITED
Toshiyuki Matsumoto
G01 - MEASURING TESTING
Information
Patent Application
JIG FOR DETECTING POSITION
Publication number
20090115422
Publication date
May 7, 2009
TOKYO ELECTRON LIMITED
Toshiyuki Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
JIG FOR DETECTING POSTION
Publication number
20090033908
Publication date
Feb 5, 2009
TOKYO ELECTRON LIMITED
Toshiyuki Matsumoto
G01 - MEASURING TESTING
Information
Patent Application
Microstructure Inspecting Apparatus and Microstructure Inspecting M...
Publication number
20080302185
Publication date
Dec 11, 2008
Masami Yakabe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Device, Method and Program for Inspecting Microstructure
Publication number
20080190206
Publication date
Aug 14, 2008
TOKYO ELECTRON LIMITED
Toshiyuki Matsumoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Temperature measuring device, thermal processor having temperature...
Publication number
20070170170
Publication date
Jul 26, 2007
Noboyuki Sata
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Temperature measuring device and method for measuring wafer-type th...
Publication number
20070147468
Publication date
Jun 28, 2007
Toshiyuki Matsumoto
G01 - MEASURING TESTING
Information
Patent Application
Device for inspecting micro structure, method for inspecting micro...
Publication number
20050279170
Publication date
Dec 22, 2005
Katsuya Okumura
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Capacitance measurement method of micro structures of integrated ci...
Publication number
20050225350
Publication date
Oct 13, 2005
Matsumoto Toshiyuki
G01 - MEASURING TESTING
Information
Patent Application
Electrostatic capacitance sensor, electrostatic capacitance sensor...
Publication number
20050140378
Publication date
Jun 30, 2005
Yoshihiro Hirota
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
Impedance measuring circuit and capacitance measuring circuit
Publication number
20050030046
Publication date
Feb 10, 2005
Masami Yakabe
G01 - MEASURING TESTING
Information
Patent Application
Sputtering device
Publication number
20040089541
Publication date
May 13, 2004
Toshiyuki Matsumoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Impedance detection circuit, impedance detector and method of imped...
Publication number
20020171454
Publication date
Nov 21, 2002
Masami Yakabe
G01 - MEASURING TESTING