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Toshiyuki Nakagawa

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Patents Grantslast 30 patents

  • Information Patent Grant

    Multi zone spot heating in EPI
    • Patent number 12,163,229
    • Issue date Dec 10, 2024
    • Applied Materials, Inc.
    • Shu-Kwan Lau
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Spot heating by moving a beam with horizontal rotary motion
    • Patent number 11,842,907
    • Issue date Dec 12, 2023
    • Applied Materials, Inc.
    • Shu-Kwan Danny Lau
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Multi zone spot heating in EPI
    • Patent number 11,821,088
    • Issue date Nov 21, 2023
    • Applied Materials, Inc.
    • Shu-Kwan Lau
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Support ring with plasma spray coating
    • Patent number 11,594,445
    • Issue date Feb 28, 2023
    • Applied Materials, Inc.
    • Jian Wu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer spot heating with beam width modulation
    • Patent number 11,177,144
    • Issue date Nov 16, 2021
    • Applied Materials, Inc.
    • Shu-Kwan Lau
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Multi zone spot heating in epi
    • Patent number 11,021,795
    • Issue date Jun 1, 2021
    • Applied Materials, Inc.
    • Shu-Kwan Lau
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Support ring with masked edge
    • Patent number 10,373,859
    • Issue date Aug 6, 2019
    • Applied Materials, Inc.
    • Mehran Behdjat
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Support ring with masked edge
    • Patent number 10,056,286
    • Issue date Aug 21, 2018
    • Applied Materials, Inc.
    • Mehran Behdjat
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Support ring with masked edge
    • Patent number 9,842,759
    • Issue date Dec 12, 2017
    • Applied Materials, Inc.
    • Mehran Behdjat
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Support ring with masked edge
    • Patent number 9,330,955
    • Issue date May 3, 2016
    • Applied Materials, Inc.
    • Mehran Behdjat
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Apparatus and method for aligning and controlling edge deposition o...
    • Patent number 6,328,808
    • Issue date Dec 11, 2001
    • Applied Materials, Inc.
    • Kenneth Tsai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Apparatus and method for aligning and controlling edge deposition o...
    • Patent number 6,186,092
    • Issue date Feb 13, 2001
    • Applied Materials, Inc.
    • Kenneth Tsai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    MULTI ZONE SPOT HEATING IN EPI
    • Publication number 20240044004
    • Publication date Feb 8, 2024
    • Applied Materials, Inc.
    • Shu-Kwan LAU
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    SPOT HEATING BY MOVING A BEAM WITH HORIZONTAL ROTARY MOTION
    • Publication number 20230369077
    • Publication date Nov 16, 2023
    • Applied Materials, Inc.
    • Shu-Kwan Danny LAU
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    SUPPORT RING WITH PLASMA SPRAY COATING
    • Publication number 20230187262
    • Publication date Jun 15, 2023
    • Applied Materials, Inc.
    • Jian WU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    AXISYMMETRIC HEATING ASSEMBLY LAYOUT WITH DOUBLE ENDED LAMP
    • Publication number 20220397706
    • Publication date Dec 15, 2022
    • Applied Materials, Inc.
    • Shu-Kwan LAU
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    EPITAXIAL DEPOSITION CHAMBER
    • Publication number 20220322492
    • Publication date Oct 6, 2022
    • Applied Materials, Inc.
    • Shu-Kwan LAU
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    SPOT HEATING BY MOVING A BEAM WITH HORIZONTAL ROTARY MOTION
    • Publication number 20220013376
    • Publication date Jan 13, 2022
    • Applied Materials, Inc.
    • Shu-Kwan Danny LAU
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    MULTI ZONE SPOT HEATING IN EPI
    • Publication number 20210285105
    • Publication date Sep 16, 2021
    • Applied Materials, Inc.
    • Shu-Kwan LAU
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    WAFER SPOT HEATING WITH BEAM WIDTH MODULATION
    • Publication number 20190371631
    • Publication date Dec 5, 2019
    • Applied Materials, Inc.
    • Shu-Kwan LAU
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    SUPPORT RING WITH PLASMA SPRAY COATING
    • Publication number 20190287845
    • Publication date Sep 19, 2019
    • Applied Materials, Inc.
    • Jian WU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MULTI ZONE SPOT HEATING IN EPI
    • Publication number 20190127851
    • Publication date May 2, 2019
    • Applied Materials, Inc.
    • Shu-Kwan LAU
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    SUPPORT RING WITH MASKED EDGE
    • Publication number 20180315639
    • Publication date Nov 1, 2018
    • Applied Materials, Inc.
    • Mehran BEHDJAT
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUPPORT RING WITH MASKED EDGE
    • Publication number 20180102274
    • Publication date Apr 12, 2018
    • Applied Materials, Inc.
    • Mehran BEHDJAT
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUPPORT RING WITH MASKED EDGE
    • Publication number 20160247708
    • Publication date Aug 25, 2016
    • Applied Materials, Inc.
    • Mehran BEHDJAT
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUPPORT RING WITH MASKED EDGE
    • Publication number 20150187630
    • Publication date Jul 2, 2015
    • Applied Materials, Inc.
    • Mehran BEHDJAT
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    CHAMBER PRESSURE CONTROL APPARATUS FOR NEAR ATMOSPHERIC EPITAXIAL G...
    • Publication number 20150013604
    • Publication date Jan 15, 2015
    • Applied Materials, Inc.
    • Toshiyuki NAKAGAWA
    • C30 - CRYSTAL GROWTH