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Toshiyuki Namikawa
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Tokyo, JP
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last 30 patents
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Patent Grant
Proximity-type microlithography apparatus and method
Patent number
5,891,806
Issue date
Apr 6, 1999
Nikon Corporation
Masato Shibuya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Projection exposure apparatus
Patent number
4,965,630
Issue date
Oct 23, 1990
Nikon Corporation
Kinya Kato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY