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Toshiyuki Nozaki
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Mitaka-shi Tokyo, JP
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last 30 patents
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Patent Grant
ECR plasma source and ECR plasma device
Patent number
7,485,204
Issue date
Feb 3, 2009
MES AFTY Corporation
Seitaro Matsuo
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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last 30 patents
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Patent Application
Ecr plasma source and ecr plasma device
Publication number
20050145339
Publication date
Jul 7, 2005
Seitaro Matsuo
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR