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Toshiyuki SAKUISHI

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  • Chigasaki-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Silicon dry etching method
    • Patent number 12,217,969
    • Issue date Feb 4, 2025
    • ULVAC, Inc.
    • Kenta Doi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing device
    • Patent number 10,079,133
    • Issue date Sep 18, 2018
    • Ulvac, Inc.
    • Takahide Murayama
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    SILICON DRY ETCHING METHOD
    • Publication number 20220044938
    • Publication date Feb 10, 2022
    • Ulvac, Inc.
    • Kenta DOI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING DEVICE
    • Publication number 20170316917
    • Publication date Nov 2, 2017
    • ULVAC, Inc.
    • Takahide MURAYAMA
    • H01 - BASIC ELECTRIC ELEMENTS