Toshiyuki Shigaraki

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 7,262,830
- Issue date Aug 28, 2007
- Canon Kabushiki Kaisha
- Toshiyuki Shigaraki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Power monitoring unit, control method therefor, and exposure apparatus
- Patent number 6,909,372
- Issue date Jun 21, 2005
- Canon Kabushiki Kaisha
- Takehiko Iwanaga
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Exposure apparatus, and device manufacturing method
- Publication number 20060066825
- Publication date Mar 30, 2006
- Canon Kabushiki Kaisha
- Toshiyuki Shigaraki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Power monitoring unit, control method therefor, and exposure apparatus
- Publication number 20040056665
- Publication date Mar 25, 2004
- Canon Kabushiki Kaisha
- Takehiko Iwanaga
- G01 - MEASURING TESTING
Information Patent Application
Semiconductor manufacturing apparatus and method of manufacturing s...
- Publication number 20020006675
- Publication date Jan 17, 2002
- Toshiyuki Shigaraki
- H01 - BASIC ELECTRIC ELEMENTS