Toshiyuki Shiokawa

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Saga-Ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
pH measuring device and pH measuring method
- Patent number 11,802,848
- Issue date Oct 31, 2023
- Tokyo Electron Limited
- Toshiyuki Shiokawa
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,424,141
- Issue date Aug 23, 2022
- Tokyo Electron Limited
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid treatment apparatus
- Patent number 11,309,194
- Issue date Apr 19, 2022
- Tokyo Electron Limited
- Koji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 10,483,137
- Issue date Nov 19, 2019
- Tokyo Electron Limited
- Hiroyuki Masutomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method, etching apparatus, and storage medium
- Patent number 9,887,092
- Issue date Feb 6, 2018
- Tokyo Electron Limited
- Takahiro Furukawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,070,549
- Issue date Jun 30, 2015
- Tokyo Electron Limited
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
pH MEASURING DEVICE AND pH MEASURING METHOD
- Publication number 20220018802
- Publication date Jan 20, 2022
- TOKYO ELECTRON LIMITED
- Toshiyuki Shiokawa
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20190122906
- Publication date Apr 25, 2019
- TOKYO ELECTRON LIMITED
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID TREATMENT APPARATUS
- Publication number 20180218924
- Publication date Aug 2, 2018
- TOKYO ELECTRON LIMITED
- Koji TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20180025927
- Publication date Jan 25, 2018
- TOKYO ELECTRON LIMITED
- Hiroyuki Masutomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD, ETCHING APPARATUS, AND STORAGE MEDIUM
- Publication number 20160233106
- Publication date Aug 11, 2016
- TOKYO ELECTRON LIMITED
- Takahiro Furukawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20100218791
- Publication date Sep 2, 2010
- TOKYO ELECTRON LIMITED
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS