-
-
-
-
-
Plasma processing apparatus
-
Patent number 6,231,726
-
Issue date May 15, 2001
-
Matsushita Electric Industrial Co., Ltd.
-
Toshiyuki Suemitsu
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
Magnetron sputtering apparatus and method
-
Patent number 5,865,961
-
Issue date Feb 2, 1999
-
Matsushita Electric Industrial Co., Ltd.
-
Masahide Yokoyama
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
Sputtering electrode
-
Patent number 5,512,156
-
Issue date Apr 30, 1996
-
Matsushita Electric Industrial Co., Ltd.
-
Hitoshi Yamanishi
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-