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Toshiyuki Takamatsu
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Yachiyo-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Method and apparatus for treating a substrate with hydrogen radical...
Patent number
6,472,299
Issue date
Oct 29, 2002
Yamanashi Prefectural Federation of Societies of Commerce and Industry
Kenzo Hiraoka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Process and apparatus for forming semiconductor thin film
Publication number
20020037634
Publication date
Mar 28, 2002
Kenzo Hiraoka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...