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Toshiyuki TODOROKI
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Yokohama, JP
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last 30 patents
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Patent Grant
Defect classifying method and optical inspection apparatus for sili...
Patent number
9,551,672
Issue date
Jan 24, 2017
Lasertec Corporation
Hirokazu Seki
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
DEFECT CLASSIFYING METHOD AND INSPECTION APPARATUS
Publication number
20150168311
Publication date
Jun 18, 2015
Lasertec Corporation
Hirokazu SEKI
G01 - MEASURING TESTING
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Patent Application
INSPECTION SYSTEM AND INSPECTION METHOD
Publication number
20110242312
Publication date
Oct 6, 2011
Lasertec Corporation
Hirokazu SEKI
G06 - COMPUTING CALCULATING COUNTING