Tou-Yu Chen

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Tainan, TW

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Patents Grantslast 30 patents

Information Patent Grant
Polysilicon hard mask etch defect particle removal
- Patent number 6,852,472
- Issue date Feb 8, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chu-Sheng Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Polysilicon hard mask etch defect particle removal
- Publication number 20040081918
- Publication date Apr 29, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chu-Sheng Lee
- H01 - BASIC ELECTRIC ELEMENTS