-
Trap apparatus
-
Patent number 5,819,683
-
Issue date Oct 13, 1998
-
Tokyo Electron Limited
-
Towl Ikeda
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
Process gas supply apparatus
-
Patent number 5,730,804
-
Issue date Mar 24, 1998
-
Tokyo Electron Limited
-
Hisashi Gomi
-
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
-
Decompression container
-
Patent number 5,676,757
-
Issue date Oct 14, 1997
-
Tokyo Electron Limited
-
Towl Ikeda
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
Decompression container
-
Patent number 5,520,142
-
Issue date May 28, 1996
-
Tokyo Electron Kabushiki Kaisha
-
Towl Ikeda
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-
-
Vacuum creating method and apparatus
-
Patent number 5,426,865
-
Issue date Jun 27, 1995
-
Tokyo Electron Limited
-
Towl Ikeda
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-
-
Probe apparatus
-
Patent number 5,198,755
-
Issue date Mar 30, 1993
-
Tokyo Electron Limited
-
Towl Ikeda
-
G01 - MEASURING TESTING
-
Quartz probe apparatus
-
Patent number 5,091,694
-
Issue date Feb 25, 1992
-
Tokyo Electron Limited
-
Towl Ikeda
-
G01 - MEASURING TESTING
-
Probe device
-
Patent number 5,061,894
-
Issue date Oct 29, 1991
-
Tokyo Electron Limited
-
Towl Ikeda
-
G01 - MEASURING TESTING
-