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Toyohiro KAMADA
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Nirasaki City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
11,201,053
Issue date
Dec 14, 2021
Tokyo Electron Limited
Noriaki Fukiage
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
10,714,332
Issue date
Jul 14, 2020
Tokyo Electron Limited
Noriaki Fukiage
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
9,922,820
Issue date
Mar 20, 2018
Tokyo Electron Limited
Noriaki Fukiage
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming nitride film with plasma
Patent number
9,478,410
Issue date
Oct 25, 2016
Tokyo Electron Limited
Toyohiro Kamada
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20200294787
Publication date
Sep 17, 2020
TOKYO ELECTRON LIMITED
Noriaki FUKIAGE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS
Publication number
20180135170
Publication date
May 17, 2018
TOKYO ELECTRON LIMITED
Noriaki FUKIAGE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film Forming Method and Film Forming Apparatus
Publication number
20170271143
Publication date
Sep 21, 2017
TOKYO ELECTRON LIMITED
Noriaki FUKIAGE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film Forming Methd and Film Forming Apparatus
Publication number
20170221703
Publication date
Aug 3, 2017
TOKYO ELECTRON LIMITED
Noriaki FUKIAGE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Member for Plasma Processing Apparatus and Plasma Processing Apparatus
Publication number
20170133204
Publication date
May 11, 2017
TOKYO ELECTRON LIMITED
Kazuki MOYAMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film Forming Method and Film Forming Apparatus
Publication number
20160322218
Publication date
Nov 3, 2016
TOKYO ELECTRON LIMITED
Noriaki FUKIAGE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD
Publication number
20160172183
Publication date
Jun 16, 2016
TOKYO ELECTRON LIMITED
Toyohiro Kamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EVAPORATING APPARATUS AND EVAPORATING METHOD
Publication number
20130209666
Publication date
Aug 15, 2013
TOKYO ELECTRON LIMITED
Tomiko Kamada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION APPARATUS, DEPOSITION METHOD, AND STORAGE MEDIUM HAVING...
Publication number
20110183069
Publication date
Jul 28, 2011
TOKYO ELECTRON LIMITED
Hiroyuki Ikuta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...