Toyohisa TSURUDA

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Thermal imaging sensor for integration into track system
- Patent number 12,123,778
- Issue date Oct 22, 2024
- Tokyo Electron Limited
- Michael Carcasi
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Estimation model creation device, estimation model creation method,...
- Patent number 12,051,189
- Issue date Jul 30, 2024
- Tokyo Electron Limited
- Toyohisa Tsuruda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate treatment method and substrate treatment system
- Patent number 11,876,022
- Issue date Jan 16, 2024
- Tokyo Electron Limited
- Masashi Enomoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing control method, substrate processing apparatus...
- Patent number 11,862,496
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Toyohisa Tsuruda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method to calibrate a plurality of wafer inspection syst...
- Patent number 11,703,459
- Issue date Jul 18, 2023
- Tokyo Electron Limited
- Michael Carcasi
- G01 - MEASURING TESTING
Information Patent Grant
Information processing method, information processing apparatus and...
- Patent number 11,636,579
- Issue date Apr 25, 2023
- Tokyo Electron Limited
- Toyohisa Tsuruda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate inspection system, substrate inspection method and record...
- Patent number 11,555,691
- Issue date Jan 17, 2023
- Tokyo Electron Limited
- Hiroshi Nakamura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Shape characteristic value estimation apparatus, shape characterist...
- Patent number 11,544,864
- Issue date Jan 3, 2023
- Tokyo Electron Limited
- Toyohisa Tsuruda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate inspection method, substrate inspection system, and contr...
- Patent number 11,461,885
- Issue date Oct 4, 2022
- Tokyo Electron Limited
- Toyohisa Tsuruda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 10,937,673
- Issue date Mar 2, 2021
- Tokyo Electron Limited
- Madoka Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process recipe evaluation method, storage medium, assisting device...
- Patent number 10,248,030
- Issue date Apr 2, 2019
- Tokyo Electron Limited
- Toyohisa Tsuruda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for photo-lithographic processing in semiconductor device ma...
- Patent number 10,211,050
- Issue date Feb 19, 2019
- Tokyo Electron Limited
- Hidetami Yaegashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Treatment solution supply method, treatment solution supply apparat...
- Patent number 10,023,477
- Issue date Jul 17, 2018
- Tokyo Electron Limited
- Masato Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, method for processing substrate, an...
- Patent number 8,992,687
- Issue date Mar 31, 2015
- Tokyo Electron Limited
- Hiroyuki Kudoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate warpage removal apparatus and substrate processing apparatus
- Patent number 8,801,891
- Issue date Aug 12, 2014
- Tokyo Electron Limited
- Toyohisa Tsuruda
- B32 - LAYERED PRODUCTS
Information Patent Grant
Resist pattern slimming treatment method
- Patent number 8,455,183
- Issue date Jun 4, 2013
- Tokyo Electron Limited
- Toyohisa Tsuruda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SHAPE CHARACTERISTIC VALUE ESTIMATION APPARATUS, SHAPE CHARACTERIST...
- Publication number 20240404042
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Toyohisa TSURUDA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ESTIMATION MODEL CREATION DEVICE, ESTIMATION MODEL CREATION METHOD,...
- Publication number 20240338809
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Toyohisa TSURUDA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL...
- Publication number 20240096658
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Toyohisa Tsuruda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD
- Publication number 20240096657
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Toyohisa Tsuruda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD
- Publication number 20240096656
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Toyohisa Tsuruda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING CONTROL METHOD, SUBSTRATE PROCESSING APPARATUS...
- Publication number 20240087928
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Toyohisa TSURUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20230085325
- Publication date Mar 16, 2023
- TOKYO ELECTRON LIMITED
- Hirokazu KYOKANE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ESTIMATION MODEL CREATION DEVICE, ESTIMATION MODEL CREATION METHOD,...
- Publication number 20220207711
- Publication date Jun 30, 2022
- TOKYO ELECTRON LIMITED
- Toyohisa TSURUDA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Thermal Imaging Sensor for Integration into Track System
- Publication number 20210285822
- Publication date Sep 16, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- G01 - MEASURING TESTING
Information Patent Application
INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD AND...
- Publication number 20210262781
- Publication date Aug 26, 2021
- TOKYO ELECTRON LIMITED
- Masahide Tadokoro
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INFORMATION PROCESSING METHOD, INFORMATION PROCESSING APPARATUS AND...
- Publication number 20210256666
- Publication date Aug 19, 2021
- TOKYO ELECTRON LIMITED
- Toyohisa TSURUDA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SHAPE CHARACTERISTIC VALUE ESTIMATION APPARATUS, SHAPE CHARACTERIST...
- Publication number 20210201516
- Publication date Jul 1, 2021
- TOKYO ELECTRON LIMITED
- Toyohisa TSURUDA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT SYSTEM
- Publication number 20210183712
- Publication date Jun 17, 2021
- TOKYO ELECTRON LIMITED
- Masashi ENOMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD TO CALIBRATE A PLURALITY OF WAFER INSPECTION SYST...
- Publication number 20210131977
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING CONTROL METHOD, SUBSTRATE PROCESSING APPARATUS...
- Publication number 20210090919
- Publication date Mar 25, 2021
- TOKYO ELECTRON LIMITED
- Toyohisa TSURUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION SYSTEM, AND CONTR...
- Publication number 20200388025
- Publication date Dec 10, 2020
- TOKYO ELECTRON LIMITED
- Toyohisa TSURUDA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE INSPECTION SYSTEM, SUBSTRATE INSPECTION METHOD AND RECORD...
- Publication number 20200386538
- Publication date Dec 10, 2020
- TOKYO ELECTRON LIMITED
- Hiroshi Nakamura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20190189475
- Publication date Jun 20, 2019
- TOKYO ELECTRON LIMITED
- Madoka Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS RECIPE EVALUATION METHOD, STORAGE MEDIUM, ASSISTING DEVICE...
- Publication number 20180239257
- Publication date Aug 23, 2018
- TOKYO ELECTRON LIMITED
- Toyohisa TSURUDA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20160358769
- Publication date Dec 8, 2016
- TOKYO ELECTRON LIMITED
- Hidetami YAEGASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device Manufacturing Method
- Publication number 20160049292
- Publication date Feb 18, 2016
- TOKYO ELECTRON LIMITED
- Hidetami YAEGASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATMENT SOLUTION SUPPLY METHOD, TREATMENT SOLUTION SUPPLY APPARAT...
- Publication number 20150375170
- Publication date Dec 31, 2015
- TOKYO ELECTRON LIMITED
- Masato HAYASHI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE WARPAGE REMOVAL APPARATUS, SUBSTRATE PROCESSING APPARATUS...
- Publication number 20120301832
- Publication date Nov 29, 2012
- TOKYO ELECTRON LIMITED
- Toyohisa TSURUDA
- B32 - LAYERED PRODUCTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR PROCESSING SUBSTRATE, AN...
- Publication number 20110308464
- Publication date Dec 22, 2011
- TOKYO ELECTRON LIMITED
- Hiroyuki Kudoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Resist pattern slimming treatment method
- Publication number 20100291490
- Publication date Nov 18, 2010
- TOKYO ELECTRON LIMITED
- Toyohisa Tsuruda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Resist pattern slimming treatment method
- Publication number 20100291491
- Publication date Nov 18, 2010
- TOKYO ELECTRON LIMITED
- Masahiro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR PROCESSING SUBSTRATE, AN...
- Publication number 20090029046
- Publication date Jan 29, 2009
- TOKYO ELECTRON LIMITED
- Hiroyuki Kudoh
- H01 - BASIC ELECTRIC ELEMENTS

Toyohisa TSURUDA

Person

Patents Grantslast 30 patents

Thermal imaging sensor for integration into track system

Estimation model creation device, estimation model creation method,...

Substrate treatment method and substrate treatment system

Substrate processing control method, substrate processing apparatus...

System and method to calibrate a plurality of wafer inspection syst...

Information processing method, information processing apparatus and...

Substrate inspection system, substrate inspection method and record...

Shape characteristic value estimation apparatus, shape characterist...

Substrate inspection method, substrate inspection system, and contr...

Substrate processing apparatus, substrate processing method and rec...

Process recipe evaluation method, storage medium, assisting device...

Method for photo-lithographic processing in semiconductor device ma...

Treatment solution supply method, treatment solution supply apparat...

Substrate processing apparatus, method for processing substrate, an...

Substrate warpage removal apparatus and substrate processing apparatus

Resist pattern slimming treatment method

Patents Applicationslast 30 patents

SHAPE CHARACTERISTIC VALUE ESTIMATION APPARATUS, SHAPE CHARACTERIST...

ESTIMATION MODEL CREATION DEVICE, ESTIMATION MODEL CREATION METHOD,...

ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL...

ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD

ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD

SUBSTRATE PROCESSING CONTROL METHOD, SUBSTRATE PROCESSING APPARATUS...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

ESTIMATION MODEL CREATION DEVICE, ESTIMATION MODEL CREATION METHOD,...

Thermal Imaging Sensor for Integration into Track System

INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD AND...

INFORMATION PROCESSING METHOD, INFORMATION PROCESSING APPARATUS AND...

SHAPE CHARACTERISTIC VALUE ESTIMATION APPARATUS, SHAPE CHARACTERIST...

SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT SYSTEM

SYSTEM AND METHOD TO CALIBRATE A PLURALITY OF WAFER INSPECTION SYST...

SUBSTRATE PROCESSING CONTROL METHOD, SUBSTRATE PROCESSING APPARATUS...

SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION SYSTEM, AND CONTR...

SUBSTRATE INSPECTION SYSTEM, SUBSTRATE INSPECTION METHOD AND RECORD...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...

PROCESS RECIPE EVALUATION METHOD, STORAGE MEDIUM, ASSISTING DEVICE...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD

Semiconductor Device Manufacturing Method

TREATMENT SOLUTION SUPPLY METHOD, TREATMENT SOLUTION SUPPLY APPARAT...

SUBSTRATE WARPAGE REMOVAL APPARATUS, SUBSTRATE PROCESSING APPARATUS...

SUBSTRATE PROCESSING APPARATUS, METHOD FOR PROCESSING SUBSTRATE, AN...

Resist pattern slimming treatment method

Resist pattern slimming treatment method

SUBSTRATE PROCESSING APPARATUS, METHOD FOR PROCESSING SUBSTRATE, AN...