Toyoki Kitayama

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Hyogo, JP

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Patents Grantslast 30 patents

Information Patent Grant
X-ray exposure apparatus and method, semiconductor manufacturing ap...
- Patent number 6,947,519
- Issue date Sep 20, 2005
- Canon Kabushiki Kaisha
- Kenji Itoga
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
X-ray exposure apparatus, X-ray exposure method, X-ray mask, X-ray...
- Patent number 6,947,518
- Issue date Sep 20, 2005
- Mitsubishi Denki Kabushiki Kaisha
- Kenji Itoga
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Exposing method and semiconductor device fabricated by the exposing...
- Patent number 6,760,400
- Issue date Jul 6, 2004
- Mitsubishi Denki Kabushiki Kaisha
- Hiroshi Watanabe
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
X-ray exposure method, x-ray exposure apparatus, fine structure and...
- Patent number 6,735,275
- Issue date May 11, 2004
- Mitsubishi Denki Kabushiki Kaisha
- Kenji Itoga
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
Exposing method and semiconductor device fabricated by the exposing...
- Publication number 20030152190
- Publication date Aug 14, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Hiroshi Watanabe
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
X-ray exposure method, x-ray exposure apparatus, fine structure and...
- Publication number 20030099324
- Publication date May 29, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Kenji Itoga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method, exposure apparatus, X-ray mask, semiconductor devi...
- Publication number 20020196896
- Publication date Dec 26, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Toyoki Kitayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
X-ray exposure apparatus and method, semiconductor manufacturing ap...
- Publication number 20020048341
- Publication date Apr 25, 2002
- Kenji Itoga
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
X-ray exposure apparatus, X-ray exposure method, X-ray mask, X-ray...
- Publication number 20010021239
- Publication date Sep 13, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Kenji Itoga
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING