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Polishing apparatus
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Patent number 7,198,552
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Issue date Apr 3, 2007
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Ebara Corporation
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Toyomi Nishi
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B24 - GRINDING POLISHING
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Polishing apparatus
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Patent number RE38215
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Issue date Aug 12, 2003
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Ebara Corporation
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Miki Shibata
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451 - Abrading
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Polishing apparatus
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Patent number 6,413,357
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Issue date Jul 2, 2002
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Ebara Corporation
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Tetsuji Togawa
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B24 - GRINDING POLISHING
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Polishing apparatus
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Patent number 6,409,582
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Issue date Jun 25, 2002
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Ebara Corporation
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Tetsuji Togawa
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B08 - CLEANING
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Polishing apparatus
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Patent number 6,139,677
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Issue date Oct 31, 2000
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Ebara Corporation
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Tetsuji Togawa
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B24 - GRINDING POLISHING
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Polishing apparatus
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Patent number 6,074,276
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Issue date Jun 13, 2000
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Ebara Corporation
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Miki Shibata
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B24 - GRINDING POLISHING
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Polishing apparatus
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Patent number 6,050,884
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Issue date Apr 18, 2000
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Ebara Corporation
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Tetsuji Togawa
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B08 - CLEANING
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Polishing apparatus
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Patent number 5,931,723
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Issue date Aug 3, 1999
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Ebara Corporation
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Seiji Katsuoka
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B08 - CLEANING
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Polishing apparatus
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Patent number 5,885,134
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Issue date Mar 23, 1999
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Ebara Corporation
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Miki Shibata
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B24 - GRINDING POLISHING
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Polishing apparatus
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Patent number 5,860,847
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Issue date Jan 19, 1999
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Ebara Corporation
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Kunihiko Sakurai
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B24 - GRINDING POLISHING
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Polishing apparatus
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Patent number 5,839,947
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Issue date Nov 24, 1998
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Ebara Corporation
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Norio Kimura
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B24 - GRINDING POLISHING
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Polishing facility
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Patent number 5,827,110
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Issue date Oct 27, 1998
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Kabushiki Kaisha Toshiba
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Hiromi Yajima
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B08 - CLEANING
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Polishing apparatus
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Patent number 5,645,473
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Issue date Jul 8, 1997
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Ebara Corporation
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Tetsuji Togawa
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B24 - GRINDING POLISHING