Toyomi Uenoyama

Person

Osaka-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Device and method for supplying gas while dividing to chamber from...
- Patent number 9,098,082
- Issue date Aug 4, 2015
- Fujikin Incorporated
- Kazuhiko Sugiyama
- G05 - CONTROLLING REGULATING
Information Patent Grant
Device and method for supplying gas while dividing to chamber from...
- Patent number 8,496,022
- Issue date Jul 30, 2013
- Fujikin Incorporated
- Kazuhiko Sugiyama
- G05 - CONTROLLING REGULATING
Information Patent Grant
Automatic zero point correction device for a pressure sensor, a pre...
- Patent number 7,669,455
- Issue date Mar 2, 2010
- Fujikin Incorporated
- Tadahiro Ohmi
- G01 - MEASURING TESTING
Information Patent Grant
Method of supplying divided gas to a chamber from a gas supply appa...
- Patent number 7,059,363
- Issue date Jun 13, 2006
- Fujikin Incorporated
- Kazuhiko Sugiyama
- G05 - CONTROLLING REGULATING
Information Patent Grant
Parallel divided flow-type fluid supply apparatus, and fluid-switch...
- Patent number 6,848,470
- Issue date Feb 1, 2005
- Fujikin Incorporated
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Parallel divided flow-type fluid supply apparatus, and fluid-switch...
- Patent number 6,820,632
- Issue date Nov 23, 2004
- Fujikin Incorporated
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Parallel divided flow-type fluid supply apparatus, and fluid-switch...
- Patent number 6,422,264
- Issue date Jul 23, 2002
- Fujikin Incorporated
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
DEVICE AND METHOD FOR SUPPLYING GAS WHILE DIVIDING TO CHAMBER FROM...
- Publication number 20130340837
- Publication date Dec 26, 2013
- TOKYO ELECTRON LTD.
- Kazuhiko Sugiyama
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Apparatus and method of dividing and supplying gas to a chamber fro...
- Publication number 20110094596
- Publication date Apr 28, 2011
- FUJIKIN INCORPORATED
- Kazuhiko Sugiyama
- G05 - CONTROLLING REGULATING
Information Patent Application
Automatic zero point correction device for a pressure sensor, a pre...
- Publication number 20070151321
- Publication date Jul 5, 2007
- FUJIKIN INCORPORATED
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING
Information Patent Application
Method for supplying gas while dividing to chamber from gas supply...
- Publication number 20050005994
- Publication date Jan 13, 2005
- Kazuhiko Sugiyama
- G05 - CONTROLLING REGULATING
Information Patent Application
Parallel divided flow-type fluid supply apparatus, and fluid-switch...
- Publication number 20040154664
- Publication date Aug 12, 2004
- FUJIKIN INCORPORATED
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING
Information Patent Application
Parallel divided flow-type fluid supply apparatus, and fluid-switch...
- Publication number 20020179149
- Publication date Dec 5, 2002
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING
Information Patent Application
Parallel divided flow-type fluid supply apparatus, and fluid-switch...
- Publication number 20010004903
- Publication date Jun 28, 2001
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING

Toyomi Uenoyama

Person

Patents Grantslast 30 patents

Device and method for supplying gas while dividing to chamber from...

Device and method for supplying gas while dividing to chamber from...

Automatic zero point correction device for a pressure sensor, a pre...

Method of supplying divided gas to a chamber from a gas supply appa...

Parallel divided flow-type fluid supply apparatus, and fluid-switch...

Parallel divided flow-type fluid supply apparatus, and fluid-switch...

Parallel divided flow-type fluid supply apparatus, and fluid-switch...

Patents Applicationslast 30 patents

DEVICE AND METHOD FOR SUPPLYING GAS WHILE DIVIDING TO CHAMBER FROM...

Apparatus and method of dividing and supplying gas to a chamber fro...

Automatic zero point correction device for a pressure sensor, a pre...

Method for supplying gas while dividing to chamber from gas supply...

Parallel divided flow-type fluid supply apparatus, and fluid-switch...

Parallel divided flow-type fluid supply apparatus, and fluid-switch...

Parallel divided flow-type fluid supply apparatus, and fluid-switch...