Toyotaka Kataoka

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Fabrication method for semiconductor devices and transparent mask f...
- Patent number 5,036,209
- Issue date Jul 30, 1991
- Fujitsu Limited
- Toyotaka Kataoka
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam exposure system using line beams
- Patent number 4,980,567
- Issue date Dec 25, 1990
- Fujitsu Limited
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY