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Toyozo Otsuka
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Kamifukuoka, JP
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last 30 patents
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Patent Grant
Method of refining silicon tetrafluoride gas
Patent number
4,457,901
Issue date
Jul 3, 1984
Central Glass Company, Limited
Naomichi Kitsugi
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Process of preparing silicon tetrafluoride by using hydrogen fluori...
Patent number
4,382,071
Issue date
May 3, 1983
Central Glass Company, Limited
Toyozo Otsuka
C01 - INORGANIC CHEMISTRY