Tracy A. Gast

Person

Waconia, MN, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for treating a workpiece with arrays of nozzles
- Patent number 9,666,456
- Issue date May 30, 2017
- Tel FSI, Inc.
- Jimmy D. Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tools and methods for processing microelectronic workpieces using p...
- Patent number 9,039,840
- Issue date May 26, 2015
- Tel FSI, Inc.
- Jeffrey M. Lauerhaas
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and apparatus for treating a workpiece with arrays of nozzles
- Patent number 8,978,675
- Issue date Mar 17, 2015
- Tel FSI, Inc.
- Jimmy D. Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Barrier structure and nozzle device for use in tools used to proces...
- Patent number 8,967,167
- Issue date Mar 3, 2015
- Tel FSI, Inc.
- Jimmy D. Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tools and methods for processing microelectronic workpieces using p...
- Patent number 8,684,015
- Issue date Apr 1, 2014
- Tel FSI, Inc.
- Jeffrey M. Lauerhaas
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of removing liquid from a barrier structure
- Patent number 8,668,778
- Issue date Mar 11, 2014
- Tel FSI, Inc.
- Jimmy D. Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Barrier structure and nozzle device for use in tools used to proces...
- Patent number 8,387,635
- Issue date Mar 5, 2013
- Tel FSI, Inc.
- Jimmy D. Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tools and methods for processing microelectronic workpieces using p...
- Patent number 8,235,062
- Issue date Aug 7, 2012
- FSI International, Inc.
- Jeffrey M. Lauerhaas
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Methods for rinsing microelectronic substrates utilizing cool rinse...
- Patent number 8,070,884
- Issue date Dec 6, 2011
- FSI International, Inc.
- Tracy A. Gast
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rinsing methodologies for barrier plate and venturi containment sys...
- Patent number 7,913,706
- Issue date Mar 29, 2011
- FSI International, Inc.
- David DeKraker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microelectronic device drying devices and techniques
- Patent number 7,244,315
- Issue date Jul 17, 2007
- FSI International, Inc.
- Tracy A. Gast
- B08 - CLEANING
Information Patent Grant
Edge gripping device for handling a set of semiconductor wafers in...
- Patent number 6,845,779
- Issue date Jan 25, 2005
- FSI International, Inc.
- Tim W. Herbst
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR TREATING A WORKPIECE WITH ARRAYS OF NOZZLES
- Publication number 20150170941
- Publication date Jun 18, 2015
- TEL FSI, Inc.
- Jimmy D. Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TOOLS AND METHODS FOR PROCESSING MICROELECTRONIC WORKPIECES USING P...
- Publication number 20130213485
- Publication date Aug 22, 2013
- TEL FSI, Inc.
- Jeffrey M. Lauerhaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR TREATING A WORKPIECE WITH ARRAYS OF NOZZLES
- Publication number 20130037511
- Publication date Feb 14, 2013
- FSI International, Inc.
- Jimmy D. Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF REMOVING LIQUID FROM A BARRIER STRUCTURE
- Publication number 20130032172
- Publication date Feb 7, 2013
- FSI International, Inc.
- Jimmy D. Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BARRIER STRUCTURE AND NOZZLE DEVICE FOR USE IN TOOLS USED TO PROCES...
- Publication number 20130032182
- Publication date Feb 7, 2013
- FSI International, Inc.
- Jimmy D. Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TOOLS AND METHODS FOR PROCESSING MICROELECTRONIC WORKPIECES USING P...
- Publication number 20120272893
- Publication date Nov 1, 2012
- Jeffrey M. Lauerhaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID AEROSOL PARTICLE REMOVAL METHOD
- Publication number 20110180114
- Publication date Jul 28, 2011
- Jeffery W. Butterbaugh
- B08 - CLEANING
Information Patent Application
Tools and methods for processing microelectronic workpieces using p...
- Publication number 20090280235
- Publication date Nov 12, 2009
- Jeffrey M. Lauerhaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Rinsing methodologies for barrier plate and venturi containment sys...
- Publication number 20090038647
- Publication date Feb 12, 2009
- David DeKraker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid aersol particle removal method
- Publication number 20080006303
- Publication date Jan 10, 2008
- Jeffery W. Butterbaugh
- B08 - CLEANING
Information Patent Application
Barrier structure and nozzle device for use in tools used to proces...
- Publication number 20080008834
- Publication date Jan 10, 2008
- Jimmy D. Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Microelectronic device drying devices and techniques
- Publication number 20070246080
- Publication date Oct 25, 2007
- Tracy A. Gast
- B08 - CLEANING
Information Patent Application
METHODS FOR RINSING MICROELECTRONIC SUBSTRATES UTILIZING COOL RINSE...
- Publication number 20060219258
- Publication date Oct 5, 2006
- FSI International, Inc.
- Tracy A. Gast
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Microelectronic device drying devices and techniques
- Publication number 20050067001
- Publication date Mar 31, 2005
- Tracy A. Gast
- B08 - CLEANING
Information Patent Application
Wafer processing using gaseous antistatic agent during drying phase...
- Publication number 20050000549
- Publication date Jan 6, 2005
- James R. Oikari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor wafer cleaning systems and methods
- Publication number 20030098047
- Publication date May 29, 2003
- Tim W. Herbst
- H01 - BASIC ELECTRIC ELEMENTS

Tracy A. Gast

Person

Patents Grantslast 30 patents

Method and apparatus for treating a workpiece with arrays of nozzles

Tools and methods for processing microelectronic workpieces using p...

Method and apparatus for treating a workpiece with arrays of nozzles

Barrier structure and nozzle device for use in tools used to proces...

Tools and methods for processing microelectronic workpieces using p...

Method of removing liquid from a barrier structure

Barrier structure and nozzle device for use in tools used to proces...

Tools and methods for processing microelectronic workpieces using p...

Methods for rinsing microelectronic substrates utilizing cool rinse...

Rinsing methodologies for barrier plate and venturi containment sys...

Microelectronic device drying devices and techniques

Edge gripping device for handling a set of semiconductor wafers in...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR TREATING A WORKPIECE WITH ARRAYS OF NOZZLES

TOOLS AND METHODS FOR PROCESSING MICROELECTRONIC WORKPIECES USING P...

METHOD AND APPARATUS FOR TREATING A WORKPIECE WITH ARRAYS OF NOZZLES

METHOD OF REMOVING LIQUID FROM A BARRIER STRUCTURE

BARRIER STRUCTURE AND NOZZLE DEVICE FOR USE IN TOOLS USED TO PROCES...

TOOLS AND METHODS FOR PROCESSING MICROELECTRONIC WORKPIECES USING P...

LIQUID AEROSOL PARTICLE REMOVAL METHOD

Tools and methods for processing microelectronic workpieces using p...

Rinsing methodologies for barrier plate and venturi containment sys...

Liquid aersol particle removal method

Barrier structure and nozzle device for use in tools used to proces...

Microelectronic device drying devices and techniques

METHODS FOR RINSING MICROELECTRONIC SUBSTRATES UTILIZING COOL RINSE...

Microelectronic device drying devices and techniques

Wafer processing using gaseous antistatic agent during drying phase...

Semiconductor wafer cleaning systems and methods