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Travis BENTZ
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Fremont, CA, US
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last 30 patents
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Patent Application
COOLING SYSTEM FOR PROCESSING CHAMBER
Publication number
20240393018
Publication date
Nov 28, 2024
LAM RESEARCH CORPORATION
Kevin FLYNN
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
PEDESTAL INCLUDING PEDESTAL PLATES FOR SEMICONDUCTOR FAB TOOLS AND...
Publication number
20230097597
Publication date
Mar 30, 2023
LAM RESEARCH CORPORATION
Travis BENTZ
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COOLING SYSTEM FOR PROCESSING CHAMBER
Publication number
20220074627
Publication date
Mar 10, 2022
Kevin FLYNN
H01 - BASIC ELECTRIC ELEMENTS