Tri Le

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Milpitas, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Etching a metal hard mask for an integrated circuit structure
- Patent number 6,930,048
- Issue date Aug 16, 2005
- Lam Research Corporation
- SiYi Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching of organic antireflective coating
- Patent number 6,630,407
- Issue date Oct 7, 2003
- Lam Research Corporation
- Douglas Keil
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Plasma etching of organic antireflective coating
- Publication number 20020173160
- Publication date Nov 21, 2002
- Douglas Keil
- H01 - BASIC ELECTRIC ELEMENTS