Trishul BYREGOWDA SHIVALINGAIAH

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Bangalore, IN

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Patents Grantslast 30 patents

Information Patent Grant
Bipolar electrostatic chuck for etch chamber
- Patent number 12,165,899
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Shinichi Oki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
BIPOLAR ELECTROSTATIC CHUCK FOR ETCH CHAMBER
- Publication number 20240120229
- Publication date Apr 11, 2024
- Shinichi OKI
- H01 - BASIC ELECTRIC ELEMENTS