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Tristan Bret
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Darmstadt, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for analyzing and for removing a defect of an...
Patent number
10,060,947
Issue date
Aug 28, 2018
Carl Zeiss SMT GmbH
Michael Budach
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method and apparatus for processing a substrate with a focused part...
Patent number
9,721,754
Issue date
Aug 1, 2017
Carl Zeiss SMT GmbH
Tristan Bret
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method and apparatus for analyzing and/or repairing of an EUV mask...
Patent number
8,674,329
Issue date
Mar 18, 2014
Carl Zeiss SMS GmbH
Michael Budach
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Methods and systems for removing a material from a sample
Patent number
8,623,230
Issue date
Jan 7, 2014
Carl Zeiss SMS GmbH
Nicole Auth
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR PROTECTING A SUBSTRATE DURING PROCESSING B...
Publication number
20140255831
Publication date
Sep 11, 2014
Thorsten Hofmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR ANALYZING AND FOR REMOVING A DEFECT OF AN...
Publication number
20140165236
Publication date
Jun 12, 2014
Michael Budach
B82 - NANO-TECHNOLOGY
Information
Patent Application
METHOD AND APPARATUS FOR ANALYZING AND/OR REPAIRING OF AN EUV MASK...
Publication number
20130156939
Publication date
Jun 20, 2013
Michael Budach
B82 - NANO-TECHNOLOGY
Information
Patent Application
METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE WITH A FOCUSED PART...
Publication number
20120273458
Publication date
Nov 1, 2012
Tristan Bret
B82 - NANO-TECHNOLOGY
Information
Patent Application
METHOD FOR PROCESSING AN OBJECT WITH MINIATURIZED STRUCTURES
Publication number
20100297362
Publication date
Nov 25, 2010
CARL ZEISS SMS GMBH
Michael Budach
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND SYSTEMS FOR REMOVING A MATERIAL FROM A SAMPLE
Publication number
20100282596
Publication date
Nov 11, 2010
NAWOTEC GMBH
Nicole Auth
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...