Tristan M. Burton

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San Francisco, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for simulating slurry flow for a grooved polishing pad
- Patent number 6,947,862
- Issue date Sep 20, 2005
- Nikon Corporation
- John K. Eaton
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Method for simulating slurry flow for a grooved polishing pad
- Publication number 20040162688
- Publication date Aug 19, 2004
- John K. Eaton
- B24 - GRINDING POLISHING