Tristan Y. MA

Person

Lexington, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device cavity formation using directional deposition
- Patent number 11,942,361
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Armin Saeedi Vahdat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wordline contact formation in NAND devices
- Patent number 11,778,832
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Armin Saeedi Vahdat
- G11 - INFORMATION STORAGE
Information Patent Grant
Techniques and device structures based upon directional dielectric...
- Patent number 11,459,652
- Issue date Oct 4, 2022
- Applied Materials, Inc.
- M. Arif Zeeshan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Performance improvement of EUV photoresist by ion implantation
- Patent number 10,990,014
- Issue date Apr 27, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Selective photoresist etching for bridge defect removal
- Patent number 10,937,663
- Issue date Mar 2, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for processing a polycrystalline layer using an angled i...
- Patent number 10,553,448
- Issue date Feb 4, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Performance improvement of EUV photoresist by ion implantation
- Patent number 10,545,408
- Issue date Jan 28, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multiple patterning approach using ion implantation
- Patent number 10,310,379
- Issue date Jun 4, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Critical dimensions variance compensation
- Patent number 10,269,663
- Issue date Apr 23, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Three dimensional structure fabrication control using novel process...
- Patent number 10,222,202
- Issue date Mar 5, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Non-uniform gate oxide thickness for DRAM device
- Patent number 10,204,909
- Issue date Feb 12, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputter etch material selectivity
- Patent number 10,002,764
- Issue date Jun 19, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Kevin Anglin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High efficiency apparatus and method for depositing a layer on a th...
- Patent number 9,929,015
- Issue date Mar 27, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Thomas R. Omstead
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion-assisted deposition and implantation of photoresist to improve...
- Patent number 9,885,957
- Issue date Feb 6, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Maureen K. Petterson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Ion implantation for improved contact hole critical dimension unifo...
- Patent number 9,735,013
- Issue date Aug 15, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion-assisted deposition and implantation of photoresist to improve...
- Patent number 9,659,784
- Issue date May 23, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Maureen K. Petterson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation for improved etch performance
- Patent number 9,520,290
- Issue date Dec 13, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple exposure treatment for processing a patterning feature
- Patent number 9,512,517
- Issue date Dec 6, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques and apparatus for anisotropic metal etching
- Patent number 9,460,961
- Issue date Oct 4, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Thomas R. Omstead
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implant assisted metal etching
- Patent number 9,435,038
- Issue date Sep 6, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Thomas Omstead
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques and apparatus for anisotropic metal etching
- Patent number 9,396,965
- Issue date Jul 19, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for selective deposition
- Patent number 9,385,219
- Issue date Jul 5, 2016
- Applied Materials, Inc.
- Ellie Y. Yieh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electric/magnetic field guided acid diffusion
- Patent number 9,377,692
- Issue date Jun 28, 2016
- Applied Materials, Inc.
- Peng Xie
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus and method for dynamic control of ion beam energy and angle
- Patent number 9,336,998
- Issue date May 10, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques for patterning a substrate
- Patent number 9,268,228
- Issue date Feb 23, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Material engineering for high performance Li-ion battery electrodes
- Patent number 8,906,576
- Issue date Dec 9, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Blake L. Darby
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
TECHNIQUES AND DEVICE STRUCTURES BASED UPON DIRECTIONAL DIELECTRIC...
- Publication number 20220404115
- Publication date Dec 22, 2022
- Applied Materials, Inc.
- M. Arif Zeeshan
- F41 - WEAPONS
Information Patent Application
SEMICONDUCTOR DEVICE CAVITY FORMATION USING DIRECTIONAL DEPOSITION
- Publication number 20220399225
- Publication date Dec 15, 2022
- Applied Materials, Inc.
- Armin Saeedi Vahdat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORDLINE CONTACT FORMATION IN NAND DEVICES
- Publication number 20220352182
- Publication date Nov 3, 2022
- Applied Materials, Inc.
- Armin Saeedi Vahdat
- G11 - INFORMATION STORAGE
Information Patent Application
TECHNIQUES AND DEVICE STRUCTURES BASED UPON DIRECTIONAL DIELECTRIC...
- Publication number 20220119938
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- M. Arif Zeeshan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RIBBON BEAM PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION SYSTEM FOR AN...
- Publication number 20210189566
- Publication date Jun 24, 2021
- Applied Materials, Inc.
- John Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE PHOTORESIST ETCHING FOR BRIDGE DEFECT REMOVAL
- Publication number 20200098589
- Publication date Mar 26, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. MA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PERFORMANCE IMPROVEMENT OF EUV PHOTORESIST BY ION IMPLANTATION
- Publication number 20200096870
- Publication date Mar 26, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PERFORMANCE IMPROVEMENT OF EUV PHOTORESIST BY ION IMPLANTATION
- Publication number 20190056914
- Publication date Feb 21, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
THREE DIMENSIONAL STRUCTURE FABRICATION CONTROL USING NOVEL PROCESS...
- Publication number 20180340769
- Publication date Nov 29, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- G01 - MEASURING TESTING
Information Patent Application
MULTIPLE PATTERNING APPROACH USING ION IMPLANTATION
- Publication number 20180204719
- Publication date Jul 19, 2018
- Tristan Y. Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRITICAL DIMENSIONS VARIANCE COMPENSATION
- Publication number 20180197796
- Publication date Jul 12, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTER ETCH MATERIAL SELECTIVITY
- Publication number 20180174843
- Publication date Jun 21, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Kevin Anglin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR PROCESSING A POLYCRYSTALLINE LAYER USING AN ANGLED I...
- Publication number 20180122650
- Publication date May 3, 2018
- Tristan Y. Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION-ASSISTED DEPOSITION AND IMPLANTATION OF PHOTORESIST TO IMPROVE...
- Publication number 20170219926
- Publication date Aug 3, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Maureen K. Petterson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-UNIFORM GATE OXIDE THICKNESS FOR DRAM DEVICE
- Publication number 20170179133
- Publication date Jun 22, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION FOR IMPROVED CONTACT HOLE CRITICAL DIMENSION UNIFO...
- Publication number 20170178911
- Publication date Jun 22, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. MA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES AND APPARATUS FOR ANISOTROPIC METAL ETCHING
- Publication number 20160379844
- Publication date Dec 29, 2016
- Thomas R. Omstead
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIPLE EXPOSURE TREATMENT FOR PROCESSING A PATTERNING FEATURE
- Publication number 20160215385
- Publication date Jul 28, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ion Implant Assisted Metal Etching
- Publication number 20160060767
- Publication date Mar 3, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Thomas Omstead
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES AND APPARATUS FOR ANISOTROPIC METAL ETCHING
- Publication number 20160042922
- Publication date Feb 11, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Thomas R. Omstead
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES AND APPARATUS FOR ANISOTROPIC METAL ETCHING
- Publication number 20160042975
- Publication date Feb 11, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Tristan MA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH EFFICIENCY APPARATUS AND METHOD FOR DEPOSITING A LAYER ON A TH...
- Publication number 20160005594
- Publication date Jan 7, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Thomas R. Omstead
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR SELECTIVE DEPOSITION
- Publication number 20160005839
- Publication date Jan 7, 2016
- Applied Materials, Inc.
- Ellie Y. YIEH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRIC/MAGNETIC FIELD GUIDED ACID DIFFUSION
- Publication number 20150355549
- Publication date Dec 10, 2015
- Applied Materials, Inc.
- Peng XIE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR DYNAMIC CONTROL OF ION BEAM ENERGY AND ANGLE
- Publication number 20150325410
- Publication date Nov 12, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Techniques For Patterning A Substrate
- Publication number 20140242523
- Publication date Aug 28, 2014
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANISOTROPIC SURFACE ENERGY MODULATION BY ION IMPLANTATION
- Publication number 20140037858
- Publication date Feb 6, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Material Engineering for High Performance Li-ion Battery Electrodes
- Publication number 20130189579
- Publication date Jul 25, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Blake L. Darby
- H01 - BASIC ELECTRIC ELEMENTS

Tristan Y. MA

Person

Patents Grantslast 30 patents

Semiconductor device cavity formation using directional deposition

Wordline contact formation in NAND devices

Techniques and device structures based upon directional dielectric...

Performance improvement of EUV photoresist by ion implantation

Selective photoresist etching for bridge defect removal

Techniques for processing a polycrystalline layer using an angled i...

Performance improvement of EUV photoresist by ion implantation

Multiple patterning approach using ion implantation

Critical dimensions variance compensation

Three dimensional structure fabrication control using novel process...

Non-uniform gate oxide thickness for DRAM device

Sputter etch material selectivity

High efficiency apparatus and method for depositing a layer on a th...

Ion-assisted deposition and implantation of photoresist to improve...

Ion implantation for improved contact hole critical dimension unifo...

Ion-assisted deposition and implantation of photoresist to improve...

Ion implantation for improved etch performance

Multiple exposure treatment for processing a patterning feature

Techniques and apparatus for anisotropic metal etching

Ion implant assisted metal etching

Techniques and apparatus for anisotropic metal etching

Method and apparatus for selective deposition

Electric/magnetic field guided acid diffusion

Apparatus and method for dynamic control of ion beam energy and angle

Techniques for patterning a substrate

Material engineering for high performance Li-ion battery electrodes

Patents Applicationslast 30 patents

TECHNIQUES AND DEVICE STRUCTURES BASED UPON DIRECTIONAL DIELECTRIC...

SEMICONDUCTOR DEVICE CAVITY FORMATION USING DIRECTIONAL DEPOSITION

WORDLINE CONTACT FORMATION IN NAND DEVICES

TECHNIQUES AND DEVICE STRUCTURES BASED UPON DIRECTIONAL DIELECTRIC...

RIBBON BEAM PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION SYSTEM FOR AN...

SELECTIVE PHOTORESIST ETCHING FOR BRIDGE DEFECT REMOVAL

PERFORMANCE IMPROVEMENT OF EUV PHOTORESIST BY ION IMPLANTATION

PERFORMANCE IMPROVEMENT OF EUV PHOTORESIST BY ION IMPLANTATION

THREE DIMENSIONAL STRUCTURE FABRICATION CONTROL USING NOVEL PROCESS...

MULTIPLE PATTERNING APPROACH USING ION IMPLANTATION

CRITICAL DIMENSIONS VARIANCE COMPENSATION

SPUTTER ETCH MATERIAL SELECTIVITY

TECHNIQUES FOR PROCESSING A POLYCRYSTALLINE LAYER USING AN ANGLED I...

ION-ASSISTED DEPOSITION AND IMPLANTATION OF PHOTORESIST TO IMPROVE...

NON-UNIFORM GATE OXIDE THICKNESS FOR DRAM DEVICE

ION IMPLANTATION FOR IMPROVED CONTACT HOLE CRITICAL DIMENSION UNIFO...

TECHNIQUES AND APPARATUS FOR ANISOTROPIC METAL ETCHING

MULTIPLE EXPOSURE TREATMENT FOR PROCESSING A PATTERNING FEATURE

Ion Implant Assisted Metal Etching

TECHNIQUES AND APPARATUS FOR ANISOTROPIC METAL ETCHING

TECHNIQUES AND APPARATUS FOR ANISOTROPIC METAL ETCHING

HIGH EFFICIENCY APPARATUS AND METHOD FOR DEPOSITING A LAYER ON A TH...

METHOD AND APPARATUS FOR SELECTIVE DEPOSITION

ELECTRIC/MAGNETIC FIELD GUIDED ACID DIFFUSION

APPARATUS AND METHOD FOR DYNAMIC CONTROL OF ION BEAM ENERGY AND ANGLE

Techniques For Patterning A Substrate

ANISOTROPIC SURFACE ENERGY MODULATION BY ION IMPLANTATION

Material Engineering for High Performance Li-ion Battery Electrodes