Tsai Wen Sung

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Processing of workpieces using deposition process and etch process
- Patent number 11,462,413
- Issue date Oct 4, 2022
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Shanyu Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon mandrel etch after native oxide punch-through
- Patent number 11,387,115
- Issue date Jul 12, 2022
- BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
- Chun Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spacer etching process
- Patent number 11,276,560
- Issue date Mar 15, 2022
- Mattson Technology, Inc.
- Tsai Wen Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spacer open process by dual plasma
- Patent number 11,195,718
- Issue date Dec 7, 2021
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Tsai Wen Sung
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Spacer Etching Process
- Publication number 20210066047
- Publication date Mar 4, 2021
- Mattson Technology, Inc.
- Tsai Wen Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing Of Workpieces Using Deposition Process And Etch Process
- Publication number 20210020445
- Publication date Jan 21, 2021
- Mattson Technology, Inc.
- Shanyu Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Spacer Open Process By Dual Plasma
- Publication number 20210005456
- Publication date Jan 7, 2021
- Mattson Technology, Inc.
- Tsai Wen Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON MANDREL ETCH AFTER NATIVE OXIDE PUNCH-THROUGH
- Publication number 20200203182
- Publication date Jun 25, 2020
- Mattson Technology, Inc.
- Chun Yan
- H01 - BASIC ELECTRIC ELEMENTS