TSANG-FANG JENG

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Hsinchu City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Protection gas control method for non-sealed process chamber
- Patent number 7,809,474
- Issue date Oct 5, 2010
- Industrial Technology Research Institute
- Chun-Hung Huang
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
ON LINE VIBRATION DETECTED AND INTELLIGENT CONTROL APPARATUS FOR CU...
- Publication number 20120243952
- Publication date Sep 27, 2012
- Industrial Technology Research Institute
- Tzu-Hsin Kuo
- G05 - CONTROLLING REGULATING
Information Patent Application
PROTECTION GAS CONTROL METHOD AND APPARATUS FOR NON-SEALED PROCESS...
- Publication number 20090182457
- Publication date Jul 16, 2009
- Industrial Technology Research Institute
- CHUN-HUNG HUANG
- G05 - CONTROLLING REGULATING