Tsang Jung Lin

Follow

Person

Taoyuan Hsien, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Method for improving the uniformity of wafer-to-wafer film thickness
- Patent number 6,218,320
- Issue date Apr 17, 2001
- United Microelectronics Corp.
- Tsung-Lin Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for planarizing a damascene structure
- Patent number 6,211,060
- Issue date Apr 3, 2001
- United Microelectronics Corp.
- Tsang-Jung Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Slurry providing system
- Patent number 6,132,078
- Issue date Oct 17, 2000
- United Integrated Circuits Corp.
- Tsang-Jung Lin
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical-mechanical polishing station with end-point monitoring device
- Patent number 6,077,147
- Issue date Jun 20, 2000
- United Microelectronics Corporation
- Ming-Sheng Yang
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Device for chemical mechanical polishing
- Publication number 20030134581
- Publication date Jul 17, 2003
- Hsing Maw Wang
- B24 - GRINDING POLISHING
Information Patent Application
Apparatus for chemical mechanical polishing
- Publication number 20030114076
- Publication date Jun 19, 2003
- Hui-Chun Chang
- B24 - GRINDING POLISHING
Information Patent Application
Method of depositing thin films and apparatus for depositing the same
- Publication number 20030056727
- Publication date Mar 27, 2003
- Tsang Jung Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL-MECHANICAL POLISHING APPARATUS WITH MEGASONIC ENERGY SLURR...
- Publication number 20010050142
- Publication date Dec 13, 2001
- TSANG-JUNG LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...