Tsang-Mu Lai

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Hsin-Chu, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing MEMS structures
- Patent number 7,176,047
- Issue date Feb 13, 2007
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ming-Chih Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Method for manufacturing MEMS structures
- Publication number 20050170544
- Publication date Aug 4, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd.
- M.C. Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY