Tseh-Jen Hsieh

Person

Rowley, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Ion source with single-slot tubular cathode
- Patent number 11,631,567
- Issue date Apr 18, 2023
- Applied Materials, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle yield via beam-line pressure control
- Patent number 11,562,885
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- Thomas Stacy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydrogen generator for an ion implanter
- Patent number 11,276,543
- Issue date Mar 15, 2022
- Axcelis Technologies, Inc.
- Neil K Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid metal ion source
- Patent number 11,170,967
- Issue date Nov 9, 2021
- Axcelis Technologies, Inc.
- Neil Bassom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source with single-slot tubular cathode
- Patent number 11,127,557
- Issue date Sep 21, 2021
- Applied Materials, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydrogen bleed gas for an ion source housing
- Patent number 11,062,873
- Issue date Jul 13, 2021
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydrogen generator for an ion implanter
- Patent number 10,847,339
- Issue date Nov 24, 2020
- Axcelis Technologies, Inc.
- Neil K Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydrogen co-gas when using aluminum iodide as an ion source material
- Patent number 10,676,370
- Issue date Jun 9, 2020
- Axcelis Technologies, Inc.
- Neil Colvin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lanthanated tungsten ion source and beamline components
- Patent number 10,535,498
- Issue date Jan 14, 2020
- Axcelis Technologies, Inc.
- Neil K Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source repeller shield comprising a labyrinth seal
- Patent number 10,361,069
- Issue date Jul 23, 2019
- Axcelis Technologies, Inc.
- Neil K. Colvin
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Phosphine co-gas for carbon implants
- Patent number 10,361,081
- Issue date Jul 23, 2019
- Axcelis Technologies, Inc.
- Neil Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Phosphorous trifluoride co-gas for carbon implants
- Patent number 10,256,069
- Issue date Apr 9, 2019
- Axcelis Technologies, Inc.
- Neil Colvin
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
In-situ cleaning using hydrogen peroxide as co-gas to primary dopan...
- Patent number 10,170,286
- Issue date Jan 1, 2019
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Implementation of co-gases for germanium and boron ion implants
- Patent number 9,984,855
- Issue date May 29, 2018
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source liner having a lip for ion implantation systems
- Patent number 9,978,555
- Issue date May 22, 2018
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source cathode shield
- Patent number 9,941,087
- Issue date Apr 10, 2018
- Axcells Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-piece electrode aperture
- Patent number 9,870,893
- Issue date Jan 16, 2018
- Axcelis Technologies, Inc.
- Neil K Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydrogen COGas for carbon implant
- Patent number 9,805,912
- Issue date Oct 31, 2017
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduced trace metals contamination ion source for an ion implantati...
- Patent number 9,543,110
- Issue date Jan 10, 2017
- Axcelis Technologies, Inc.
- Neil Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automatic control system for selection and optimization of co-gas f...
- Patent number 8,779,395
- Issue date Jul 15, 2014
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carbon implantation process and carbon ion precursor composition
- Patent number 8,524,584
- Issue date Sep 3, 2013
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GA IMPLANT PROCESS CONTROL FOR ENHANCED PARTICLE PERFORMANCE
- Publication number 20230386786
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CYCLOTRON HAVING CONTINUOUSLY VARIABLE ENERGY OUTPUT
- Publication number 20230207247
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Model-Based Controlled Load Lock Pumping Scheme
- Publication number 20230138326
- Publication date May 4, 2023
- Applied Materials, Inc.
- D. Jeffrey Lischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE YIELD VIA BEAM-LINE PRESSURE CONTROL
- Publication number 20220037114
- Publication date Feb 3, 2022
- Applied Materials, Inc.
- Thomas Stacy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE WITH SINGLE-SLOT TUBULAR CATHODE
- Publication number 20210383995
- Publication date Dec 9, 2021
- Applied Materials, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE WITH SINGLE-SLOT TUBULAR CATHODE
- Publication number 20210287872
- Publication date Sep 16, 2021
- Applied Materials, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDROGEN GENERATOR FOR AN ION IMPLANTER
- Publication number 20210090841
- Publication date Mar 25, 2021
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID METAL ION SOURCE
- Publication number 20200303154
- Publication date Sep 24, 2020
- Axcelis Technologies, Inc.
- Neil Bassom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDROGEN BLEED GAS FOR AN ION SOURCE HOUSING
- Publication number 20190348252
- Publication date Nov 14, 2019
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDROGEN GENERATOR FOR AN ION IMPLANTER
- Publication number 20190228943
- Publication date Jul 25, 2019
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LANTHANATED TUNGSTEN ION SOURCE AND BEAMLINE COMPONETS
- Publication number 20180358202
- Publication date Dec 13, 2018
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Hydrogen CO-Gas When Using Aluminum Iodide as an Ion Source Material
- Publication number 20180346342
- Publication date Dec 6, 2018
- Axcelis Technologies, Inc.
- Neil Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOSPHINE CO-GAS FOR CARBON IMPLANTS
- Publication number 20180144940
- Publication date May 24, 2018
- Axcelis Technologies, Inc.
- Neil Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOSPHOROUS TRIFLUORIDE CO-GAS FOR CARBON IMPLANTS
- Publication number 20180144904
- Publication date May 24, 2018
- Axcelis Technologies, Inc.
- Neil Colvin
- C01 - INORGANIC CHEMISTRY
Information Patent Application
IN-SITU CLEANING USING HYDROGEN PEROXIDE AS CO-GAS TO PRIMARY DOPAN...
- Publication number 20180096828
- Publication date Apr 5, 2018
- Axcelis Technologies, Inc.
- Neil K. Colvin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LANTHANATED TUNGSTEN ION SOURCE AND BEAMLINE COMPONENTS
- Publication number 20170330725
- Publication date Nov 16, 2017
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE REPELLER SHIELD
- Publication number 20170287579
- Publication date Oct 5, 2017
- Axcelis Technologies, Inc.
- Neil K. Colvin
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
ION SOURCE CATHODE SHIELD
- Publication number 20170207054
- Publication date Jul 20, 2017
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-PIECE ELECTRODE APERTURE
- Publication number 20170207057
- Publication date Jul 20, 2017
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE LINER HAVING A LIP FOR ION IMPLANTATION SYSTEMS
- Publication number 20170133193
- Publication date May 11, 2017
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION SOURCE WITH TEXTURED INTERIOR SURFACES
- Publication number 20150357151
- Publication date Dec 10, 2015
- Axcelis Technologies, Inc.
- Neil Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCED TRACE METALS CONTAMINATION ION SOURCE FOR AN ION IMPLANTATI...
- Publication number 20150179393
- Publication date Jun 25, 2015
- Axcelis Technologies, Inc.
- Neil Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Flourine and HF Resistant Seals for an Ion Source
- Publication number 20140319994
- Publication date Oct 30, 2014
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Automatic Control System for Selection and Optimization of Co-Gas F...
- Publication number 20130140473
- Publication date Jun 6, 2013
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARBON IMPLANTATION PROCESS AND CARBON ION PRECURSOR COMPOSITION
- Publication number 20120190181
- Publication date Jul 26, 2012
- Axcelis Technologies, Inc.
- WILLIAM D. LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Implementation of CO-Gases for Germanium and Boron Ion Implants
- Publication number 20120119113
- Publication date May 17, 2012
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Hydrogen COGas For Carbon Implant
- Publication number 20120118232
- Publication date May 17, 2012
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS

Tseh-Jen Hsieh

Person

Patents Grantslast 30 patents

Ion source with single-slot tubular cathode

Particle yield via beam-line pressure control

Hydrogen generator for an ion implanter

Liquid metal ion source

Ion source with single-slot tubular cathode

Hydrogen bleed gas for an ion source housing

Hydrogen generator for an ion implanter

Hydrogen co-gas when using aluminum iodide as an ion source material

Lanthanated tungsten ion source and beamline components

Ion source repeller shield comprising a labyrinth seal

Phosphine co-gas for carbon implants

Phosphorous trifluoride co-gas for carbon implants

In-situ cleaning using hydrogen peroxide as co-gas to primary dopan...

Implementation of co-gases for germanium and boron ion implants

Ion source liner having a lip for ion implantation systems

Ion source cathode shield

Multi-piece electrode aperture

Hydrogen COGas for carbon implant

Reduced trace metals contamination ion source for an ion implantati...

Automatic control system for selection and optimization of co-gas f...

Carbon implantation process and carbon ion precursor composition

Patents Applicationslast 30 patents

GA IMPLANT PROCESS CONTROL FOR ENHANCED PARTICLE PERFORMANCE

CYCLOTRON HAVING CONTINUOUSLY VARIABLE ENERGY OUTPUT

Model-Based Controlled Load Lock Pumping Scheme

PARTICLE YIELD VIA BEAM-LINE PRESSURE CONTROL

ION SOURCE WITH SINGLE-SLOT TUBULAR CATHODE

ION SOURCE WITH SINGLE-SLOT TUBULAR CATHODE

HYDROGEN GENERATOR FOR AN ION IMPLANTER

LIQUID METAL ION SOURCE

HYDROGEN BLEED GAS FOR AN ION SOURCE HOUSING

HYDROGEN GENERATOR FOR AN ION IMPLANTER

LANTHANATED TUNGSTEN ION SOURCE AND BEAMLINE COMPONETS

Hydrogen CO-Gas When Using Aluminum Iodide as an Ion Source Material

PHOSPHINE CO-GAS FOR CARBON IMPLANTS

PHOSPHOROUS TRIFLUORIDE CO-GAS FOR CARBON IMPLANTS

IN-SITU CLEANING USING HYDROGEN PEROXIDE AS CO-GAS TO PRIMARY DOPAN...

LANTHANATED TUNGSTEN ION SOURCE AND BEAMLINE COMPONENTS

ION SOURCE REPELLER SHIELD

ION SOURCE CATHODE SHIELD

MULTI-PIECE ELECTRODE APERTURE

ION SOURCE LINER HAVING A LIP FOR ION IMPLANTATION SYSTEMS

ION IMPLANTATION SOURCE WITH TEXTURED INTERIOR SURFACES

REDUCED TRACE METALS CONTAMINATION ION SOURCE FOR AN ION IMPLANTATI...

Flourine and HF Resistant Seals for an Ion Source

Automatic Control System for Selection and Optimization of Co-Gas F...

CARBON IMPLANTATION PROCESS AND CARBON ION PRECURSOR COMPOSITION

Implementation of CO-Gases for Germanium and Boron Ion Implants

Hydrogen COGas For Carbon Implant