Tseng-Chung Lee

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San Jose, CA, US

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Patents Applicationslast 30 patents

Information Patent Application
TWO STEP PROCESS FOR POST ASH CLEANING FOR CU/LOW-K DUAL DAMASCENE...
- Publication number 20080163897
- Publication date Jul 10, 2008
- APPLIED MATERIALS, INC.
- JIANSHE TANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Two step process for post ash cleaning for Cu/low-k dual damascene...
- Publication number 20080163905
- Publication date Jul 10, 2008
- Jianshe Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR ACTIVE PARTICLE AND CONTAMINANT REMOVAL IN...
- Publication number 20080135070
- Publication date Jun 12, 2008
- Wei Lu
- B08 - CLEANING
Information Patent Application
Method and apparatus for active particle and contaminant removal in...
- Publication number 20080135069
- Publication date Jun 12, 2008
- Wei Lu
- B08 - CLEANING