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Tsu-Yu Chu
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Tao-Yuan, TW
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last 30 patents
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Patent Grant
Mask containing alignment mark protection pattern
Patent number
5,902,707
Issue date
May 11, 1999
Taiwan Semiconductor Manufacturing Company, Ltd.
Tsu-Yu Chu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Use of sub divided pattern for alignment mark recovery after inter-...
Patent number
5,843,600
Issue date
Dec 1, 1998
Taiwan Semiconductor Manufacturing Company, Ltd.
Tsu-Yu Chu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY