Tsubasa IMAMURA

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Etching method, semiconductor manufacturing apparatus, and method o...
- Patent number 11,651,969
- Issue date May 16, 2023
- Kioxia Corporation
- Chihiro Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern forming method and method of manufacturing semiconductor de...
- Patent number 11,024,510
- Issue date Jun 1, 2021
- Kioxia Corporation
- Tsubasa Imamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device and semiconductor manu...
- Patent number 10,727,278
- Issue date Jul 28, 2020
- TOSHIBA MEMORY CORPORATION
- Tsubasa Imamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing 3-dimensional memories including high aspec...
- Patent number 10,490,415
- Issue date Nov 26, 2019
- TOSHIBA MEMORY CORPORATION
- Tsubasa Imamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 10,381,198
- Issue date Aug 13, 2019
- TOSHIBA MEMORY CORPORATION
- Akio Ui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 10,026,622
- Issue date Jul 17, 2018
- TOSHIBA MEMORY CORPORATION
- Mitsuhiro Omura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for manufacturing same
- Patent number 9,871,054
- Issue date Jan 16, 2018
- TOSHIBA MEMORY CORPORATION
- Tsubasa Imamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor memory device and method for manufacturing same
- Patent number 9,502,470
- Issue date Nov 22, 2016
- Kabushiki Kaisha Toshiba
- Atsushi Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 9,384,980
- Issue date Jul 5, 2016
- Kabushiki Kaisha Toshiba
- Yasuhito Yoshimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 9,373,523
- Issue date Jun 21, 2016
- Kabushiki Kaisha Toshiba
- Keisuke Kikutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern formation method
- Patent number 9,111,875
- Issue date Aug 18, 2015
- Kabushiki Kaisha Toshiba
- Hiroshi Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 9,105,584
- Issue date Aug 11, 2015
- Kabushiki Kaisha Toshiba
- Mitsuhiro Omura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 8,536,061
- Issue date Sep 17, 2013
- Kabushiki Kaisha Toshiba
- Hisataka Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating semiconductor device
- Patent number 7,902,076
- Issue date Mar 8, 2011
- Kabushiki Kaisha Toshiba
- Tsubasa Imamura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND MANUFACTURING METHOD OF A SEMICONDUCTOR MEMORY D...
- Publication number 20240321570
- Publication date Sep 26, 2024
- KIOXIA Corporation
- Ayata HARAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, FILM THICKNESS MEASU...
- Publication number 20240290666
- Publication date Aug 29, 2024
- KIOXIA Corporation
- Makoto MORIYAMA
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20230307520
- Publication date Sep 28, 2023
- KIOXIA Corporation
- Takuya KIKUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20230274942
- Publication date Aug 31, 2023
- KIOXIA Corporation
- Hiroshi NAMBU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD O...
- Publication number 20230114349
- Publication date Apr 13, 2023
- KIOXIA Corporation
- Chihiro ABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20220406611
- Publication date Dec 22, 2022
- KIOXIA Corporation
- Atsushi TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING...
- Publication number 20220399222
- Publication date Dec 15, 2022
- KIOXIA Corporation
- Wu LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME
- Publication number 20220077183
- Publication date Mar 10, 2022
- KIOXIA Corporation
- Takaumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN FORMING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DE...
- Publication number 20210090893
- Publication date Mar 25, 2021
- KIOXIA Corporation
- Tsubasa IMAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD O...
- Publication number 20210020450
- Publication date Jan 21, 2021
- Kioxia Corporation
- Chihiro ABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...
- Publication number 20190288035
- Publication date Sep 19, 2019
- Toshiba Memory Corporation
- Tsubasa IMAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
- Publication number 20170301686
- Publication date Oct 19, 2017
- Kabushiki Kaisha Toshiba
- Tsubasa Imamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20170271170
- Publication date Sep 21, 2017
- Kabushiki Kaisha Toshiba
- Mitsuhiro OMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20170263611
- Publication date Sep 14, 2017
- Kabushiki Kaisha Toshiba
- Tsubasa IMAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHDO
- Publication number 20170169996
- Publication date Jun 15, 2017
- Kabushiki Kaisha Toshiba
- Akio UI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN FORMING METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20160079076
- Publication date Mar 17, 2016
- Kabushiki Kaisha Toshiba
- HIROSHI YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20160071739
- Publication date Mar 10, 2016
- KABUSHIKI KAISHA TOSHIBA
- Keisuke KIKUTANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20160071741
- Publication date Mar 10, 2016
- Kabushiki Kaisha Toshiba
- Tsubasa IMAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME
- Publication number 20160035792
- Publication date Feb 4, 2016
- Kabushiki Kaisha Toshiba
- Atsushi TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing Method of Semiconductor Device
- Publication number 20160005604
- Publication date Jan 7, 2016
- Kabushiki Kaisha Toshiba
- Yasuhito YOSHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20150064913
- Publication date Mar 5, 2015
- Kabushiki Kaisha Toshiba
- MITSUHIRO OMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN FORMATION METHOD
- Publication number 20150011089
- Publication date Jan 8, 2015
- KABUSHIKI KAISHA TOSHIBA
- Hiroshi Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20140083977
- Publication date Mar 27, 2014
- Kabushiki Kaisha Toshiba
- Akio UI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20120034785
- Publication date Feb 9, 2012
- Hisataka HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING SEMICONDUCTOR DEVICE
- Publication number 20100003818
- Publication date Jan 7, 2010
- Tsubasa IMAMURA
- H01 - BASIC ELECTRIC ELEMENTS

Tsubasa IMAMURA

Person

Patents Grantslast 30 patents

Etching method, semiconductor manufacturing apparatus, and method o...

Pattern forming method and method of manufacturing semiconductor de...

Method of manufacturing semiconductor device and semiconductor manu...

Method of manufacturing 3-dimensional memories including high aspec...

Plasma processing apparatus and plasma processing method

Method for manufacturing semiconductor device

Semiconductor device and method for manufacturing same

Semiconductor memory device and method for manufacturing same

Manufacturing method of semiconductor device

Semiconductor device manufacturing method

Pattern formation method

Method of manufacturing a semiconductor device

Semiconductor device manufacturing method

Method of fabricating semiconductor device

Patents Applicationslast 30 patents

ETCHING METHOD AND MANUFACTURING METHOD OF A SEMICONDUCTOR MEMORY D...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, FILM THICKNESS MEASU...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

ETCHING METHOD, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD O...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING...

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME

PATTERN FORMING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DE...

ETCHING METHOD, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD O...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHDO

PATTERN FORMING METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

SEMICONDUCTOR DEVICE MANUFACTURING METHOD

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME

Manufacturing Method of Semiconductor Device

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

PATTERN FORMATION METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

SEMICONDUCTOR DEVICE MANUFACTURING METHOD

METHOD OF FABRICATING SEMICONDUCTOR DEVICE