Tsubasa NANAO

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Multi charged particle beam adjustment method, multi charged partic...
- Patent number 11,804,360
- Issue date Oct 31, 2023
- NuFlare Technology, Inc.
- Tsubasa Nanao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi charged particle beam writing apparatus and method of adjusti...
- Patent number 11,740,546
- Issue date Aug 29, 2023
- NuFlare Technology, Inc.
- Tsubasa Nanao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multibeam-focus adjusting method, multibeam-focus measuring method,...
- Patent number 10,490,388
- Issue date Nov 26, 2019
- NuFlare Technology, Inc.
- Tsubasa Nanao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam drawing apparatus and multi charged par...
- Patent number 10,388,488
- Issue date Aug 20, 2019
- NuFlare Technology, Inc.
- Hirofumi Morita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing apparatus and method of adjusti...
- Patent number 10,157,723
- Issue date Dec 18, 2018
- NuFlare Technology, Inc.
- Tsubasa Nanao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of aperture alignment and multi charged particle beam writin...
- Patent number 10,042,261
- Issue date Aug 7, 2018
- NuFlare Technology, Inc.
- Tsubasa Nanao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MULTI CHARGED PARTICLE BEAM ADJUSTMENT METHOD, MULTI CHARGED PARTIC...
- Publication number 20230005711
- Publication date Jan 5, 2023
- NuFlare Technology, Inc.
- Tsubasa NANAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...
- Publication number 20220359156
- Publication date Nov 10, 2022
- NuFlare Technology, Inc.
- Tsubasa NANAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD OF ADJUSTI...
- Publication number 20220299861
- Publication date Sep 22, 2022
- NuFlare Technology, Inc.
- Tsubasa NANAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTI CHARGED PARTICLE BEAM DRAWING APPARATUS AND MULTI CHARGED PAR...
- Publication number 20180350552
- Publication date Dec 6, 2018
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIBEAM-FOCUS ADJUSTING METHOD, MULTIBEAM-FOCUS MEASURING METHOD,...
- Publication number 20180108511
- Publication date Apr 19, 2018
- NuFlare Technology, Inc.
- Tsubasa NANAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD OF ADJUSTI...
- Publication number 20180040453
- Publication date Feb 8, 2018
- NuFlare Technology, Inc.
- Tsubasa NANAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF APERTURE ALIGNMENT AND MULTI CHARGED PARTICLE BEAM WRITIN...
- Publication number 20170146910
- Publication date May 25, 2017
- NuFlare Technology, Inc.
- Tsubasa NANAO
- H01 - BASIC ELECTRIC ELEMENTS

Tsubasa NANAO

Person

Patents Grantslast 30 patents

Multi charged particle beam adjustment method, multi charged partic...

Multi charged particle beam writing apparatus and method of adjusti...

Multibeam-focus adjusting method, multibeam-focus measuring method,...

Multi charged particle beam drawing apparatus and multi charged par...

Multi charged particle beam writing apparatus and method of adjusti...

Method of aperture alignment and multi charged particle beam writin...

Patents Applicationslast 30 patents

MULTI CHARGED PARTICLE BEAM ADJUSTMENT METHOD, MULTI CHARGED PARTIC...

MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD OF ADJUSTI...

MULTI CHARGED PARTICLE BEAM DRAWING APPARATUS AND MULTI CHARGED PAR...

MULTIBEAM-FOCUS ADJUSTING METHOD, MULTIBEAM-FOCUS MEASURING METHOD,...

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD OF ADJUSTI...

METHOD OF APERTURE ALIGNMENT AND MULTI CHARGED PARTICLE BEAM WRITIN...