TREA

Tsubasa WATANABE

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Patents Grantslast 30 patents

  • Information Patent Grant

    Control device, processing apparatus, and control method
    • Patent number 11,894,249
    • Issue date Feb 6, 2024
    • Tokyo Electron Limited
    • Masami Oikawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of cleaning exhaust pipe
    • Patent number 10,975,466
    • Issue date Apr 13, 2021
    • Tokyo Electron Limited
    • Takahito Umehara
    • B08 - CLEANING
  • Information Patent Grant

    Method of forming silicon-containing film
    • Patent number 10,573,514
    • Issue date Feb 25, 2020
    • Tokyo Electron Limited
    • Tsubasa Watanabe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film forming apparatus
    • Patent number 10,344,382
    • Issue date Jul 9, 2019
    • Tokyo Electron Limited
    • Hideomi Hane
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of forming silicon-containing film
    • Patent number 10,217,630
    • Issue date Feb 26, 2019
    • Tokyo Electron Limited
    • Tsubasa Watanabe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    CLEANING METHOD AND HEAT TREATMENT APPARATUS
    • Publication number 20210310739
    • Publication date Oct 7, 2021
    • TOKYO ELECTRON LIMITED
    • Tomoya HASEGAWA
    • F27 - FURNACES KILNS OVENS RETORTS
  • Information Patent Application

    METHOD OF CLEANING EXHAUST PIPE
    • Publication number 20210180182
    • Publication date Jun 17, 2021
    • TOKYO ELECTRON LIMITED
    • Takahito UMEHARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CONTROL DEVICE, PROCESSING APPARATUS, AND CONTROL METHOD
    • Publication number 20210104421
    • Publication date Apr 8, 2021
    • TOKYO ELECTRON LIMITED
    • Masami OIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF FORMING SILICON-CONTAINING FILM
    • Publication number 20190096664
    • Publication date Mar 28, 2019
    • TOKYO ELECTRON LIMITED
    • Tsubasa WATANABE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF CLEANING EXHAUST PIPE
    • Publication number 20190078198
    • Publication date Mar 14, 2019
    • TOKYO ELECTRON LIMITED
    • Takahito UMEHARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF FORMING SILICON-CONTAINING FILM
    • Publication number 20180144931
    • Publication date May 24, 2018
    • TOKYO ELECTRON LIMITED
    • Tsubasa WATANABE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film Forming Apparatus
    • Publication number 20150329964
    • Publication date Nov 19, 2015
    • TOKYO ELECTRON LIMITED
    • Hideomi HANE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...