Tsugihiro Yukitake

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Tokai-mura, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for treating perfluorocompound gas
- Patent number 7,285,250
- Issue date Oct 23, 2007
- Hitachi, Ltd.
- Shuichi Kanno
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
Apparatus for treating perfluorocompound gas
- Publication number 20020122750
- Publication date Sep 5, 2002
- Hitachi, Ltd.
- Shuichi Kanno
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL