Tsugio Okudaira

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Chemical amplification type positive resist composition
- Patent number 6,696,218
- Issue date Feb 24, 2004
- Sumitomo Chemical Company, Limited
- Kunihiro Ichimura
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
Chemical amplification type positive resist composition
- Publication number 20030013038
- Publication date Jan 16, 2003
- Kunihiro Ichimura
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC