Tsuhung HUANG

Follow

Person

Hsin-chu, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Etching method and substrate processing system
- Patent number 10,734,243
- Issue date Aug 4, 2020
- Tokyo Electron Limited
- Tsuhung Huang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20180166295
- Publication date Jun 14, 2018
- Tsuhung HUANG
- H01 - BASIC ELECTRIC ELEMENTS