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Tsukada Kazunori
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Hsin Chu City, TW
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last 30 patents
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Patent Grant
Method and apparatus for improved gate oxide uniformity with reduci...
Patent number
6,806,144
Issue date
Oct 19, 2004
Taiwan Semiconductor Manufacturing Co., Ltd
Pu-Fan Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Method and apparatus for improved gate oxide uniformity with reduci...
Publication number
20040031440
Publication date
Feb 19, 2004
Taiwan Semiconductor Manufacturing Co., Ltd.
Pu-Fan Chen
C30 - CRYSTAL GROWTH