Tsukasa Abe

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Plasma etching uniformity control
- Patent number 6,737,358
- Issue date May 18, 2004
- Intel Corporation
- Y. Long He
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Plasma etching uniformity control
- Publication number 20040099376
- Publication date May 27, 2004
- Intel Corporation, a Delaware corporation
- Y. Long He
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma etching uniformity control
- Publication number 20030153194
- Publication date Aug 14, 2003
- Y. Long He
- H01 - BASIC ELECTRIC ELEMENTS